A multimode-laser reflectometer that detects an interference spectrum by use of a multichannel wavelength detector was developed and its characteristics evaluated experimentally. A spatial resolution of 24 μm and a maximum detectable length of 510 μm were achieved. Thickness mapping of a coverglass was attempted as an application and was compared with an interference fringe between the surface and the back. Good results that reflected the tendency of an interference fringe were obtained.
© 1997 Optical Society of America
Tadayuki Funaba, Naohiro Tanno, and Hiromasa Ito, "Multimode-laser reflectometer with a multichannel wavelength detector and its application," Appl. Opt. 36, 8919-8928 (1997)