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Applied Optics

Applied Optics


  • Vol. 36, Iss. 34 — Dec. 1, 1997
  • pp: 8970–8975

Generation of large-diameter diffractive elements with laser pattern generation

John P. Bowen, Robert L. Michaels, and C. Gary Blough  »View Author Affiliations

Applied Optics, Vol. 36, Issue 34, pp. 8970-8975 (1997)

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We describe the design and construction of a high-precision laser writing machine for the direct generation of large-diameter rotationally symmetric diffractive optics with continuous profiles in photoresist. The photoresist profile can be used as a replication master surface or etched into a silica substrate. Machine design methodology, as well as qualification of performance, is provided. Test results for an f/2 100-mm clear-aperture diffractive lens directly etched into a silica substrate are presented. Diffraction efficiency as a function of zone spacing and wave-front performance are given.

© 1997 Optical Society of America

Original Manuscript: April 18, 1997
Revised Manuscript: July 24, 1997
Published: December 1, 1997

John P. Bowen, Robert L. Michaels, and C. Gary Blough, "Generation of large-diameter diffractive elements with laser pattern generation," Appl. Opt. 36, 8970-8975 (1997)

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