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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 36, Iss. 34 — Dec. 1, 1997
  • pp: 9005–9009

Dependence of measuring errors of rms roughness on stylus tip size for mechanical profilers

Vladimir Ya. Mendeleyev  »View Author Affiliations


Applied Optics, Vol. 36, Issue 34, pp. 9005-9009 (1997)
http://dx.doi.org/10.1364/AO.36.009005


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Abstract

Tracing of a random profile with a mechanical profiler with a spherical tipped stylus has been investigated by means of computer simulation. It is shown that the fractional measuring errors of rms roughness depend on only the ratio of rms roughness σ to the stylus tip radius r and the ratio of rms roughness to the 1/e correlation length ρc. The ratios σ/r were in the range of 0.005–0.05 and the ratios σ/ρc were equal to 0.028 and 0.048.

© 1997 Optical Society of America

History
Original Manuscript: July 16, 1997
Published: December 1, 1997

Citation
Vladimir Ya. Mendeleyev, "Dependence of measuring errors of rms roughness on stylus tip size for mechanical profilers," Appl. Opt. 36, 9005-9009 (1997)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-36-34-9005

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