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Applied Optics

Applied Optics


  • Vol. 36, Iss. 34 — Dec. 1, 1997
  • pp: 9005–9009

Dependence of measuring errors of rms roughness on stylus tip size for mechanical profilers

Vladimir Ya. Mendeleyev  »View Author Affiliations

Applied Optics, Vol. 36, Issue 34, pp. 9005-9009 (1997)

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Tracing of a random profile with a mechanical profiler with a spherical tipped stylus has been investigated by means of computer simulation. It is shown that the fractional measuring errors of rms roughness depend on only the ratio of rms roughness σ to the stylus tip radius r and the ratio of rms roughness to the 1/e correlation length ρc. The ratios σ/r were in the range of 0.005–0.05 and the ratios σ/ρc were equal to 0.028 and 0.048.

© 1997 Optical Society of America

Original Manuscript: July 16, 1997
Published: December 1, 1997

Vladimir Ya. Mendeleyev, "Dependence of measuring errors of rms roughness on stylus tip size for mechanical profilers," Appl. Opt. 36, 9005-9009 (1997)

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  1. K. A. O’Donnell, “Effects of finite stylus width in surface contact profilometry,” Appl. Opt. 32, 4922–4928 (1993). [CrossRef] [PubMed]
  2. V. Radhakrishnan, “Effect of stylus radius on the roughness values measured with tracing stylus instruments,” Wear 16, 325–335 (1970). [CrossRef]
  3. V. S. Luk’yanov, O. K. Komorovskii, “Error of determining surface roughness parameters by feeler probes,” Meas. Tech. (USSR) 19, 1707–1710 (1976).
  4. J. M. Bennett, J. H. Dancy, “Stylus profiling instrument for measuring statistical properties of smooth optical surfaces,” Appl. Opt. 20, 1785–1802 (1981). [CrossRef] [PubMed]
  5. V. S. Luk’yanov, Y. A. Rudzit, Parameters of Surface Roughness (in Russian) (Publishing House of Standards, Moscow, 1979).

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