OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 36, Iss. 34 — Dec. 1, 1997
  • pp: 9005–9009

Dependence of measuring errors of rms roughness on stylus tip size for mechanical profilers

Vladimir Ya. Mendeleyev  »View Author Affiliations


Applied Optics, Vol. 36, Issue 34, pp. 9005-9009 (1997)
http://dx.doi.org/10.1364/AO.36.009005


View Full Text Article

Enhanced HTML    Acrobat PDF (155 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Tracing of a random profile with a mechanical profiler with a spherical tipped stylus has been investigated by means of computer simulation. It is shown that the fractional measuring errors of rms roughness depend on only the ratio of rms roughness σ to the stylus tip radius r and the ratio of rms roughness to the 1/e correlation length ρc. The ratios σ/r were in the range of 0.005–0.05 and the ratios σ/ρc were equal to 0.028 and 0.048.

© 1997 Optical Society of America

History
Original Manuscript: July 16, 1997
Published: December 1, 1997

Citation
Vladimir Ya. Mendeleyev, "Dependence of measuring errors of rms roughness on stylus tip size for mechanical profilers," Appl. Opt. 36, 9005-9009 (1997)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-36-34-9005


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. K. A. O’Donnell, “Effects of finite stylus width in surface contact profilometry,” Appl. Opt. 32, 4922–4928 (1993). [CrossRef] [PubMed]
  2. V. Radhakrishnan, “Effect of stylus radius on the roughness values measured with tracing stylus instruments,” Wear 16, 325–335 (1970). [CrossRef]
  3. V. S. Luk’yanov, O. K. Komorovskii, “Error of determining surface roughness parameters by feeler probes,” Meas. Tech. (USSR) 19, 1707–1710 (1976).
  4. J. M. Bennett, J. H. Dancy, “Stylus profiling instrument for measuring statistical properties of smooth optical surfaces,” Appl. Opt. 20, 1785–1802 (1981). [CrossRef] [PubMed]
  5. V. S. Luk’yanov, Y. A. Rudzit, Parameters of Surface Roughness (in Russian) (Publishing House of Standards, Moscow, 1979).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Figures

Fig. 1 Fig. 2 Fig. 3
 
Fig. 4 Fig. 5
 

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited