Tracing of a random profile with a mechanical profiler with a spherical tipped stylus has been investigated by means of computer simulation. It is shown that the fractional measuring errors of rms roughness depend on only the ratio of rms roughness ς to the stylus tip radius <i>r</i> and the ratio of rms roughness to the 1/<i>e</i> correlation length ρ<sub><i>c</i></sub>. The ratios ς/r were in the range of 0.005–0.05 and the ratios ς/ρ<sub><i>c</i></sub> were equal to 0.028 and 0.048.
© 1997 Optical Society of America
Vladimir Ya. Mendeleyev, "Dependence of measuring errors of rms roughness on stylus tip size for mechanical profilers," Appl. Opt. 36, 9005-9009 (1997)