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X-ray imaging by angular raster scanning

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Abstract

The technology of x-ray W–Al multilayer mirrors with an angular reflection width of more than 0.4° at a 1.54-Å wavelength is developed. On this basis an x-ray scanner is constructed. We show experimentally the possibility of object-transfer imaging with a resolution of ∼20 µm.

© 1997 Optical Society of America

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