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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 36, Iss. 8 — Mar. 10, 1997
  • pp: 1747–1751

Resolution enhancement by extrapolation of the optically measured spectrum of surface profiles

Michael Friedmann and Joseph Shamir  »View Author Affiliations


Applied Optics, Vol. 36, Issue 8, pp. 1747-1751 (1997)
http://dx.doi.org/10.1364/AO.36.001747


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Abstract

Surface features are measured by the analysis of the diffracted field intensity distribution generated by a scanning Gaussian beam. The measured data are shown to represent the amplitude of the Gabor expansion coefficients of the complex function embossed by the surface onto the reflected wave front. The surface is reconstructed by use of a custom-designed algorithm based on generalized projections, with a resolution exceeding the classical diffraction limit.

© 1997 Optical Society of America

History
Original Manuscript: June 10, 1996
Revised Manuscript: October 21, 1996
Published: March 10, 1997

Citation
Michael Friedmann and Joseph Shamir, "Resolution enhancement by extrapolation of the optically measured spectrum of surface profiles," Appl. Opt. 36, 1747-1751 (1997)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-36-8-1747


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References

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