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Applied Optics

Applied Optics


  • Vol. 36, Iss. 8 — Mar. 10, 1997
  • pp: 1747–1751

Resolution enhancement by extrapolation of the optically measured spectrum of surface profiles

Michael Friedmann and Joseph Shamir  »View Author Affiliations

Applied Optics, Vol. 36, Issue 8, pp. 1747-1751 (1997)

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Surface features are measured by the analysis of the diffracted field intensity distribution generated by a scanning Gaussian beam. The measured data are shown to represent the amplitude of the Gabor expansion coefficients of the complex function embossed by the surface onto the reflected wave front. The surface is reconstructed by use of a custom-designed algorithm based on generalized projections, with a resolution exceeding the classical diffraction limit.

© 1997 Optical Society of America

Original Manuscript: June 10, 1996
Revised Manuscript: October 21, 1996
Published: March 10, 1997

Michael Friedmann and Joseph Shamir, "Resolution enhancement by extrapolation of the optically measured spectrum of surface profiles," Appl. Opt. 36, 1747-1751 (1997)

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