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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 37, Iss. 12 — Apr. 20, 1998
  • pp: 2429–2434

Fabrication of ridge waveguides: a new solgel route

Amir Fardad, Mark Andrews, Galina Milova, Ali Malek-Tabrizi, and Iraj Najafi  »View Author Affiliations


Applied Optics, Vol. 37, Issue 12, pp. 2429-2434 (1998)
http://dx.doi.org/10.1364/AO.37.002429


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Abstract

Passive ridge waveguides can be deposited on silicon by a solvent-assisted lithographic process incorporating simple mask technology and photosensitive solgel-derived glasses. Thick films (∼4 μm) are dip coated in one step, and channel waveguides and power splitters are imprinted in them by UV light through appropriate masks. Unexposed regions of the glass are removed by soaking of the films in n-propanol. The remaining ridges are then treated at 200 °C and planarized with a solgel cladding layer. Circular mode profiles are observed from ridge guides covered with the cladding. The waveguides are characterized with scanning electron microscopy, atomic force microscopy, surface profilometry, ellipsometry, and fiber end coupling. Overall, the procedure is simple and reproducible and leads to waveguides with low loss, of the order of 0.13 dB/cm.

© 1998 Optical Society of America

OCIS Codes
(160.6060) Materials : Solgel
(220.0220) Optical design and fabrication : Optical design and fabrication
(230.7370) Optical devices : Waveguides
(260.7190) Physical optics : Ultraviolet

History
Original Manuscript: July 29, 1997
Published: April 20, 1998

Citation
Amir Fardad, Mark Andrews, Galina Milova, Ali Malek-Tabrizi, and Iraj Najafi, "Fabrication of ridge waveguides: a new solgel route," Appl. Opt. 37, 2429-2434 (1998)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-37-12-2429

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