Absolute figure measurements with a liquid-flat reference
Applied Optics, Vol. 37, Issue 13, pp. 2579-2588 (1998)
http://dx.doi.org/10.1364/AO.37.002579
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Abstract
We describe a variation of the liquid-flat technique fordetermining the absolute flatness of a 240-mm-diameter optical surfaceto an accuracy better than 1/100λ in both its horizontal(three-point support) and vertical orientations. Using theappropriate mathematics to calculate the surface deformation of a diskdue to gravity, we achieved verification of the method by comparingmeasurements carried out on a pair of optical flats and a liquidreference surface.
© 1998 Optical Society of America
[Optical Society of America ]
OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(220.4840) Optical design and fabrication : Testing
Citation
Ian Powell and Emmanuelle Goulet, "Absolute figure measurements with a liquid-flat reference," Appl. Opt. 37, 2579-2588 (1998)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-37-13-2579
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