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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 37, Iss. 13 — May. 1, 1998
  • pp: 2579–2588

Absolute figure measurements with a liquid-flat reference

Ian Powell and Emmanuelle Goulet  »View Author Affiliations


Applied Optics, Vol. 37, Issue 13, pp. 2579-2588 (1998)
http://dx.doi.org/10.1364/AO.37.002579


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Abstract

We describe a variation of the liquid-flat technique fordetermining the absolute flatness of a 240-mm-diameter optical surfaceto an accuracy better than 1/100λ in both its horizontal(three-point support) and vertical orientations. Using theappropriate mathematics to calculate the surface deformation of a diskdue to gravity, we achieved verification of the method by comparingmeasurements carried out on a pair of optical flats and a liquidreference surface.

© 1998 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(220.4840) Optical design and fabrication : Testing

Citation
Ian Powell and Emmanuelle Goulet, "Absolute figure measurements with a liquid-flat reference," Appl. Opt. 37, 2579-2588 (1998)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-37-13-2579


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References

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  3. G. D. Dew, “Some observations on the long-term stability of optical flats,” Opt. Acta 21, 609–614 (1974).
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  5. C. Ai and J. C. Wyant, “Absolute testing of flats by using even and odd functions,” Appl. Opt. 32, 4698–4705 (1993).
  6. K-E Elssner, A. Vogel, J. Grzana, and G. Schulz, “Establishing a flatness standard,” Appl. Opt. 33, 2437–2446 (1994).
  7. J. Grzana, “Absolute testing of optical flats at points on a square grid: error propagation,” Appl. Opt. 33, 6654–6661 (1994).
  8. L. A. Selke, “Theoretical elastic deflections of a thick horizontal circular mirror on a ring support,” Appl. Opt. 9, 149–153 (1970).
  9. E. Reissner, “On bending of elastic plates,” Q. Appl. Math. 5, 55–68 (1947).
  10. S. Timoshenko, Theory of Plates and Shells (McGraw-Hill, New York, 1959).

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