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Applied Optics

Applied Optics


  • Vol. 37, Iss. 13 — May. 1, 1998
  • pp: 2579–2588

Absolute figure measurements with a liquid-flat reference

Ian Powell and Emmanuelle Goulet  »View Author Affiliations

Applied Optics, Vol. 37, Issue 13, pp. 2579-2588 (1998)

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We describe a variation of the liquid-flat technique fordetermining the absolute flatness of a 240-mm-diameter optical surfaceto an accuracy better than 1/100λ in both its horizontal(three-point support) and vertical orientations. Using theappropriate mathematics to calculate the surface deformation of a diskdue to gravity, we achieved verification of the method by comparingmeasurements carried out on a pair of optical flats and a liquidreference surface.

© 1998 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(220.4840) Optical design and fabrication : Testing

Ian Powell and Emmanuelle Goulet, "Absolute figure measurements with a liquid-flat reference," Appl. Opt. 37, 2579-2588 (1998)

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