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Applied Optics

Applied Optics


  • Vol. 37, Iss. 16 — Jun. 1, 1998
  • pp: 3471–3479

325-nm Interference microscope

Fang Cheng Chang and Gordon S. Kino  »View Author Affiliations

Applied Optics, Vol. 37, Issue 16, pp. 3471-3479 (1998)

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We first discuss an interference microscope’s 3D response in terms of Richards and Wolf’s vector theory. We then report the results we obtained with a 325-nm interference microscope using an ultraviolet transparent beam splitter, short-working-distance Mirau interferometer. The microscope performs at near-ideal definitions with a measured FWHM of the intensity spot at 0.14 μm and a FWHM of the depth envelope intensity at 0.25 μm. Feasibility of a shorter wavelength system operating at 248 nm is demonstrated.

© 1998 Optical Society of America

OCIS Codes
(180.0180) Microscopy : Microscopy
(180.3170) Microscopy : Interference microscopy
(180.6900) Microscopy : Three-dimensional microscopy

Original Manuscript: June 23, 1997
Revised Manuscript: October 29, 1997
Published: June 1, 1998

Fang Cheng Chang and Gordon S. Kino, "325-nm Interference microscope," Appl. Opt. 37, 3471-3479 (1998)

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