We first discuss an interference microscope’s 3D response in terms of Richards and Wolf’s vector theory. We then report the results we obtained with a 325-nm interference microscope using an ultraviolet transparent beam splitter, short-working-distance Mirau interferometer. The microscope performs at near-ideal definitions with a measured FWHM of the intensity spot at 0.14 μm and a FWHM of the depth envelope intensity at 0.25 μm. Feasibility of a shorter wavelength system operating at 248 nm is demonstrated.
© 1998 Optical Society of America
Fang Cheng Chang and Gordon S. Kino, "325-nm Interference Microscope," Appl. Opt. 37, 3471-3479 (1998)