325-nm Interference Microscope
Applied Optics, Vol. 37, Issue 16, pp. 3471-3479 (1998)
http://dx.doi.org/10.1364/AO.37.003471
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Abstract
We first discuss an interference microscope’s 3D response in terms of Richards and Wolf’s vector theory. We then report the results we obtained with a 325-nm interference microscope using an ultraviolet transparent beam splitter, short-working-distance Mirau interferometer. The microscope performs at near-ideal definitions with a measured FWHM of the intensity spot at 0.14 μm and a FWHM of the depth envelope intensity at 0.25 μm. Feasibility of a shorter wavelength system operating at 248 nm is demonstrated.
© 1998 Optical Society of America
[Optical Society of America ]
OCIS Codes
(180.0180) Microscopy : Microscopy
(180.3170) Microscopy : Interference microscopy
(180.6900) Microscopy : Three-dimensional microscopy
Citation
Fang Cheng Chang and Gordon S. Kino, "325-nm Interference Microscope," Appl. Opt. 37, 3471-3479 (1998)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-37-16-3471
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