OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 37, Iss. 16 — Jun. 1, 1998
  • pp: 3494–3497

Highly stable differential phase optical interferometer using rotating Ronchi gratings

H. P. Ho, K. M. Leung, K. S. Chan, and E. Y. B. Pun  »View Author Affiliations


Applied Optics, Vol. 37, Issue 16, pp. 3494-3497 (1998)
http://dx.doi.org/10.1364/AO.37.003494


View Full Text Article

Enhanced HTML    Acrobat PDF (147 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We describe a dual-beam differential phase interferometer that performs direct phase measurement by using a rotating Ronchi grating filter. Two laser beams derived from a single source are focused onto the sample surface. The reflected light will retrace the same path and intersect at the back focus of the objective lens. Interference between the reflected rays will therefore produce intensity fringes with their spatial location governed primarily by the differential optical phase of the probes. When the fringes are projected onto a rotating grating filter with identical periodicity, the transmitted optical signal becomes an oscillating signal from which the optical phase can be measured by standard phase-sensitive techniques. This approach has the advantages of simple system configuration, effective isolation from environmental disturbance, and low-frequency operation, which permit the use of high impedance electronics with shot-noise-limited performance at low laser power.

© 1998 Optical Society of America

OCIS Codes
(050.2770) Diffraction and gratings : Gratings
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology

History
Original Manuscript: October 24, 1997
Revised Manuscript: February 12, 1998
Published: June 1, 1998

Citation
H. P. Ho, K. M. Leung, K. S. Chan, and E. Y. B. Pun, "Highly stable differential phase optical interferometer using rotating Ronchi gratings," Appl. Opt. 37, 3494-3497 (1998)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-37-16-3494


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. K. J. Gasvik, Optical Metrology (Wiley, New York, 1995).
  2. C. W. See, R. K. Appel, M. G. Somekh, “Scanning differential optical profilometer for simultaneous measurement of amplitude and phase variation,” Appl. Phys. Lett. 53, 10–12 (1988). [CrossRef]
  3. Y. Y. Hung, “Digital shearography versus TY-holography for non-destructive evaluation,” Opt. Lasers Eng. 26, 421–436 (1997). [CrossRef]
  4. M. S. Valera, M. G. Somekh, R. K. Appel, “Common path differential intensity and phase profilometer using time division multiplexing,” Electron. Lett. 27, 719–720 (1991). [CrossRef]
  5. H. P. Ho, M. G. Somekh, M. Liu, C. W. See, “Direct and indirect dual-probe interferometers for accurate surface wave measurements,” Meas. Sci. Technol. 5, 1480–1490 (1994). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Figures

Fig. 1 Fig. 2 Fig. 3
 
Fig. 4 Fig. 5
 

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited