OSA's Digital Library

Applied Optics

Applied Optics


  • Vol. 37, Iss. 19 — Jul. 1, 1998
  • pp: 4100–4104

Optical constants of in situ-deposited films of important extreme-ultraviolet multilayer mirror materials

Charles Tarrio, Richard N. Watts, Thomas B. Lucatorto, Jon M. Slaughter, and Charles M. Falco  »View Author Affiliations

Applied Optics, Vol. 37, Issue 19, pp. 4100-4104 (1998)

View Full Text Article

Enhanced HTML    Acrobat PDF (184 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



We have performed angle-dependent reflectance measurements of in situ magnetron sputtered films of B4C, C, Mo, Si, and W. The Fresnel relations were used to determine the complex index of refraction from the reflectance data in the region of approximately 35–150 eV. In the cases of Si, C, and B4C we found excellent agreement with published data. However, for Mo and W we found that the optical properties from 35 to 60 eV differed significantly from those in the literature.

© 1998 Optical Society of America

OCIS Codes
(120.4530) Instrumentation, measurement, and metrology : Optical constants
(120.5700) Instrumentation, measurement, and metrology : Reflection
(300.6250) Spectroscopy : Spectroscopy, condensed matter
(300.6540) Spectroscopy : Spectroscopy, ultraviolet

Original Manuscript: January 29, 1998
Revised Manuscript: March 6, 1998
Published: July 1, 1998

Charles Tarrio, Richard N. Watts, Thomas B. Lucatorto, Jon M. Slaughter, and Charles M. Falco, "Optical constants of in situ-deposited films of important extreme-ultraviolet multilayer mirror materials," Appl. Opt. 37, 4100-4104 (1998)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. See the data tables in E. R. Palik, ed., The Handbook of Optical Constants (Academic, Orlando, Fla., 1985 and 1991), Vols. I and II.
  2. B. L. Henke, E. M. Gullikson, J. C. Davis, “X-ray interactions: photoabsorption, scattering, transmission, and reflection at E = 50–30000 eV, Z = 1–92,” At. Data Nucl. Data Tables 54, 181–342 (1993); these data are also available in electronic form at http://www-cxro.lbl.gov .
  3. D. L. Windt, J. W. C. Cash, M. Scott, P. Arendt, B. Newman, R. F. Fisher, A. B. Swartzlander, “Optical constants for thin films of Ti, Zr, Nb, Mo, Ru, Rh, Pd, Ag, Hf, Ta, W, Re, Ir, Os, Pt, and Au from 24 Å to 1216 Å,” Appl. Opt. 27, 246–278 (1988);D. L. Windt, “Optical constants for thin films of C, diamond, Al, Si, and CVD SiC from 24 Å to 1216 Å,” Appl. Opt. 27, 279–295 (1988);D. L. Windt, “XUV optical constants of single-crystal GaAs and sputtered C, Si, Cr3C2, Mo, and W,” Appl. Opt. 30, 15–25 (1991). [CrossRef] [PubMed]
  4. C. Tarrio, R. N. Watts, T. B. Lucatorto, M. Haass, T. A. Calcott, J. Jia, “New NIST/DARPA national soft x-ray reflectometry facility,” J. X-Ray Sci. Technol. 4, 96–101 (1994). [CrossRef]
  5. J. D. Jackson, Classical Electrodynamics (Wiley, New York, 1965), Chap. 7.
  6. L. Névot, P. Croce, “Caracterisation des surfaces par reflexion rasante de rayons. X. Application a l’etude du polissage de quelques verres silicates,” Rev. Phys. Appl. 15, 761–779 (1980). [CrossRef]
  7. M. Lampton, B. Margon, S. Bowyer, “Parameter estimation in x-ray astronomy,” Astrophys. J. 208, 177–190 (1976). [CrossRef]
  8. R. Soufli, E. M. Gullikson, “Reflectance measurements on clean surfaces for the determination of optical constants of silicon in the extreme ultraviolet–soft-x-ray region,” Appl. Opt. 36, 5499–5507 (1997). [CrossRef] [PubMed]
  9. C. Tarrio, S. E. Schnatterly, “Optical properties of silicon and its oxides,” J. Opt. Soc. Am. B 10, 952–957 (1993). [CrossRef]
  10. R. Soufli, E. M. Gullikson, “Absolute photoabsorption measurements of molybdenum in the range 60–930 eV for optical constant determination,” Appl. Opt. (to be published).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited