A comparative analysis is made of the errors in deriving the optical parameters (n, refractive index; k, absorption coefficient; d, film thickness) of thin films from spectrophotometric measurements at normal light incidence. The errors in determining n, k, and d by the (TR_fR_b), (TR_fR_m), (TR_bR_m), (TR_f), (TR_m), and T(k = 0) methods are compared. It is shown that they are applicable to optical constants of thin films in the n > 1.5, k < 4.5, and d/λ = (0.02–0.3) range, and their combinations make possible the determination of n and k to an accuracy of better than ∓4%. To derive the optical constants in a wide spectral range with high accuracy and isolate the correct physical solutions reliably, one should apply all methods, using the relevant solutions with the lowest errors, as shown in this research, when determining the optical constants of As₂S₃ and Sb₂Se₃ films.

© 1998 Optical Society of America

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription