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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 37, Iss. 2 — Jan. 10, 1998
  • pp: 369–373

One-dimensional antireflection gratings in (100) silicon: a numerical study

Mark Auslender, David Levy, and Shlomo Hava  »View Author Affiliations


Applied Optics, Vol. 37, Issue 2, pp. 369-373 (1998)
http://dx.doi.org/10.1364/AO.37.000369


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Abstract

The antireflection properties of V-grooved gratings in (100) crystalline silicon are studied numerically by use of rigorous electromagnetic theory. This study shows that these gratings can exhibit antireflective behavior only for TM-polarized radiation. The V-grooved structures are analyzed as a function of grating period, duty cycle, and depth of a SiO2 mask layer that is added to the tops of the V-grooved mesas. Specific antireflection grating designs (the duty cycle and depth versus the period) are presented that illustrate TM-polarized reflectivity much less than 10-3 with periods as high as 80% the wavelength of incident radiation. These designs exhibit good tolerance to fabrication errors and grating’s plane deviations in a planar-diffraction mounting.

© 1998 Optical Society of America

OCIS Codes
(040.6040) Detectors : Silicon
(050.1950) Diffraction and gratings : Diffraction gratings
(260.2110) Physical optics : Electromagnetic optics
(310.1210) Thin films : Antireflection coatings

History
Original Manuscript: April 24, 1997
Revised Manuscript: July 15, 1997
Published: January 10, 1998

Citation
Mark Auslender, David Levy, and Shlomo Hava, "One-dimensional antireflection gratings in (100) silicon: a numerical study," Appl. Opt. 37, 369-373 (1998)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-37-2-369


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References

  1. S. J. Wilson, M. C. Hutley, “The optical properties of ‘moth-eye’ antireflection surfaces,” Opt. Acta 29, 993–1009 (1982). [CrossRef]
  2. R. C. Enger, S. K. Case, “Optical elements with ultrahigh spatial frequency surface corrugations,” Appl. Opt. 22, 3220–3228 (1983). [CrossRef] [PubMed]
  3. Y. Ono, Y. Kimura, Y. Ohta, N. Nishida, “Antireflection effect in ultrahigh spatial-frequency holographic relief gratings,” Appl. Opt. 26, 1142–1146 (1987). [CrossRef] [PubMed]
  4. T. K. Gaylord, W. E. Baird, M. G. Moharam, “Zero-reflectivity homogeneous layers and high spatial-frequency rectangular-groove dielectric surface-relief gratings,” Appl. Opt. 25, 4562–4567 (1986). [CrossRef] [PubMed]
  5. E. N. Glytsis, T. K. Gaylord, “High spatial-frequency binary and multilevel stairstep gratings: polarization-selective mirrors and broadband antireflection surfaces,” Appl. Opt. 31, 4459–4470 (1991). [CrossRef]
  6. D. H. Raguin, G. M. Morris, “Antireflection structured surfaces for the infrared spectral region,” Appl. Opt. 32, 1154–1167 (1993);“Analysis of antireflection-structured surfaces with continuous one-dimensional surface profiles,” Appl. Opt. 32, 2582–2598 (1993). [CrossRef] [PubMed]
  7. M. E. Motamedi, W. H. Southwell, W. J. Gunning, “Antireflection surfaces in silicon using binary optics technology,” Appl. Opt. 31, 4371–4376 (1991). [CrossRef]
  8. S. Hava, M. Auslender, D. Rabinovich, “Operator approach in electromagnetic coupled-wave calculations of lamellar gratings: infrared optical properties of silicon gratings,” Appl. Opt. 33, 4807–4813 (1994);S. Hava, M. Auslender, “New Fourier-transform based methods for electromagnetics of layer-grating structures,” in Physics and Simulation of Optoelectronic Devices III, M. Osinski, W. W. Chow, eds., Proc. SPIE2399, 95 (1995). [CrossRef] [PubMed]
  9. C. Heine, R. Morf, “Submicrometer gratings for solar energy applications,” Appl. Opt. 34, 2476–2482 (1995). [CrossRef] [PubMed]
  10. K. E. Bean, “Anisotropic etching of silicon,” IEEE Trans. Electron. Devices ED-25, 1185–1193 (1978);K. E. Petersen, “Silicon as mechanical material,” Proc. IEEE 70, 420–457 (1982). [CrossRef]
  11. N. Rajkumar, J. N. McMullin, “V-groove gratings on silicon for infrared beam splitting,” Appl. Opt. 34, 2256–2259 (1995); “V-groove gratings for infrared beam splitting: reply,” Appl. Opt. 35, 809 (1996); J. Turunen, E. Noponen, “V-groove gratings on silicon for infrared beam splitting: comment,” Appl. Opt. 35, 807–808 (1996).
  12. S. T. Peng, T. Tamir, H. L. Bertoni, “Theory of periodic dielectric waveguide,” IEEE Trans. Microwave Theory Technol. MTT-23, 123–133 (1978).
  13. P. Vincent, “Differential methods,” in Electromagnetic Theory of Gratings, R. Petit, ed. (Springer-Verlag, Berlin, 1980), Chap. 4, pp. 101–121. [CrossRef]
  14. Local accuracy of the differential method can be higher with the use of a higher-order Runge–Cutta integration, but these algorithms lose numerical stability with increasing H, increasing M, or both. This happens because they merge the fragments of the backward and forward scattered-wave solutions together.
  15. M. Auslender, S. Hava, “S-matrix propagation algorithm in full-vectorial optics of multilayer grating structures,” Opt. Lett. 21, 1765–1767 (1996). [CrossRef] [PubMed]
  16. P. Lalanne, G. M. Morris, “Highly improved convergence of the coupled-wave method for TM polarization,” J. Opt. Soc. Am. B 13, 779–784 (1996);G. Granet, B. Guizal, “Efficient implementation of the coupled-wave method for metallic lamellar gratings in TM polarization,” J. Opt. Soc. Am. B 13, 1019–1923 (1996). [CrossRef]
  17. The term powerlike means that the truncation error behaves as O(M-a) at M ≫ 1. It was shown in Ref. 15 that a ≈ 3 for both TE and improved TM (second TM2 recipe of Ref. 15) for dielectric gratings. For metallic gratings the truncation-error decrease in TM is oscillatory.
  18. S. Hava, M. Auslender, “Silicon grating-based mirror for 1.3-μm polarized beams: matlab-aided design,” Appl. Opt. 34, 1053–1058 (1995). [CrossRef] [PubMed]

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