The performance of two-dimensional Talbot array illuminators is discussed in terms of compression ratio, fabrication cost, and illumination efficiency. By comparing two array-illuminator families, we try to answer the question, “Which Talbot array illuminator provides the best illumination performance and requires the least expenditure in fabrication for a given compression ratio?” We further present experimental results obtained with a quartz-glass four-level surface-relief array illuminator designed for a two-dimensional compression ratio of 16 and fabricated with only two lithographic masks.
© 1998 Optical Society of America
[Optical Society of America ]
(050.1380) Diffraction and gratings : Binary optics
(050.1950) Diffraction and gratings : Diffraction gratings
(050.1970) Diffraction and gratings : Diffractive optics
(070.6760) Fourier optics and signal processing : Talbot and self-imaging effects
Werner Klaus, Yoshinori Arimoto, and Kashiko Kodate, "High-Performance Talbot Array Illuminators," Appl. Opt. 37, 4357-4365 (1998)