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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 37, Iss. 20 — Jul. 10, 1998
  • pp: 4357–4365

High-performance Talbot array illuminators

Werner Klaus, Yoshinori Arimoto, and Kashiko Kodate  »View Author Affiliations


Applied Optics, Vol. 37, Issue 20, pp. 4357-4365 (1998)
http://dx.doi.org/10.1364/AO.37.004357


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Abstract

The performance of two-dimensional Talbot array illuminators is discussed in terms of compression ratio, fabrication cost, and illumination efficiency. By comparing two array-illuminator families, we try to answer the question, “Which Talbot array illuminator provides the best illumination performance and requires the least expenditure in fabrication for a given compression ratio?” We further present experimental results obtained with a quartz-glass four-level surface-relief array illuminator designed for a two-dimensional compression ratio of 16 and fabricated with only two lithographic masks.

© 1998 Optical Society of America

OCIS Codes
(050.1380) Diffraction and gratings : Binary optics
(050.1950) Diffraction and gratings : Diffraction gratings
(050.1970) Diffraction and gratings : Diffractive optics
(070.6760) Fourier optics and signal processing : Talbot and self-imaging effects

History
Original Manuscript: December 9, 1997
Revised Manuscript: March 16, 1998
Published: July 10, 1998

Citation
Werner Klaus, Yoshinori Arimoto, and Kashiko Kodate, "High-performance Talbot array illuminators," Appl. Opt. 37, 4357-4365 (1998)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-37-20-4357


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References

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