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Applied Optics

Applied Optics


  • Vol. 37, Iss. 22 — Aug. 1, 1998
  • pp: 5087–5092

Effects of gap width on vacuum-ultraviolet transmission through submicrometer-period, freestanding transmission gratings

Matthew M. Balkey, Earl E. Scime, Mark L. Schattenburg, and Joost van Beek  »View Author Affiliations

Applied Optics, Vol. 37, Issue 22, pp. 5087-5092 (1998)

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The effects of gap width on the transmission coefficient of vacuum-ultraviolet light through submicrometer-period, freestanding transmission gratings are reported. Results from computations and an analytical waveguide model are shown to be consistent with experimental measurements. These results show that thin gratings with narrow gaps and thick gratings with wide gaps are equally effective at eliminating 121.6-nm radiation. The thin gratings with the narrow gaps have the advantage of better attenuation of shorter-wavelength radiation than the thick gratings with the larger gaps.

© 1998 Optical Society of America

OCIS Codes
(230.7380) Optical devices : Waveguides, channeled
(260.7200) Physical optics : Ultraviolet, extreme
(350.2770) Other areas of optics : Gratings

Original Manuscript: February 17, 1998
Revised Manuscript: April 17, 1998
Published: August 1, 1998

Matthew M. Balkey, Earl E. Scime, Mark L. Schattenburg, and Joost van Beek, "Effects of gap width on vacuum-ultraviolet transmission through submicrometer-period, freestanding transmission gratings," Appl. Opt. 37, 5087-5092 (1998)

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