We demonstrate the planar integration of Talbot array illuminators designed to generate one-dimensional spot arrays. The array illuminator basically consists of a phase grating and a cylindrical diffractive lens integrated as a single diffractive optical element onto a transparent glass substrate. We discuss various design aspects, and we focus on problems typical for planar-integrated free-space optics like the tilted optical axis of the system. Experimental results and measurements, which were obtained from planar-integrated setups fabricated as surface-relief structures on a transparent glass substrate by use of standard photolithography, are included.
© 1998 Optical Society of America
(050.0050) Diffraction and gratings : Diffraction and gratings
(050.1380) Diffraction and gratings : Binary optics
(070.0070) Fourier optics and signal processing : Fourier optics and signal processing
(070.6760) Fourier optics and signal processing : Talbot and self-imaging effects
(350.3950) Other areas of optics : Micro-optics
Markus Testorf and Jürgen Jahns, "Planar-Integrated Talbot Array Illuminators," Appl. Opt. 37, 5399-5407 (1998)