Abstract
Optical scatterometry is a method for the on-line measurement of
the geometry of a diffraction grating, which is deduced from
diffraction-pattern data. We demonstrate the use of a neural
network as a promising method for performing an accurate quantitative
characterization of the geometry. As an example, we show the
deduction of the geometry of a grating with subwavelength grooves with
a rms accuracy of 1.9° for the slope of the groove walls, 0.7 nm for
the linewidth, and 1.0 nm for the groove depth.
© 1998 Optical Society of America
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