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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 37, Iss. 25 — Sep. 1, 1998
  • pp: 5830–5835

Optical scatterometry of subwavelength diffraction gratings: neural-network approach

Ilkka Kallioniemi, Jyrki Saarinen, and Erkki Oja  »View Author Affiliations


Applied Optics, Vol. 37, Issue 25, pp. 5830-5835 (1998)
http://dx.doi.org/10.1364/AO.37.005830


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Abstract

Optical scatterometry is a method for the on-line measurement of the geometry of a diffraction grating, which is deduced from diffraction-pattern data. We demonstrate the use of a neural network as a promising method for performing an accurate quantitative characterization of the geometry. As an example, we show the deduction of the geometry of a grating with subwavelength grooves with a rms accuracy of 1.9° for the slope of the groove walls, 0.7 nm for the linewidth, and 1.0 nm for the groove depth.

© 1998 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing
(120.5820) Instrumentation, measurement, and metrology : Scattering measurements
(260.1960) Physical optics : Diffraction theory
(290.3200) Scattering : Inverse scattering

History
Original Manuscript: October 20, 1997
Revised Manuscript: April 28, 1998
Published: September 1, 1998

Citation
Ilkka Kallioniemi, Jyrki Saarinen, and Erkki Oja, "Optical scatterometry of subwavelength diffraction gratings: neural-network approach," Appl. Opt. 37, 5830-5835 (1998)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-37-25-5830


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References

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