We examine the possibility of using two- and three-phase systems suitable as standards for which the ellipsometric parameter Ψ remains insensitive to variations in the angle of incidence. These standards avoid propagation of errors in the angle of incidence with respect to the measured standard Ψ value. Different materials (dielectrics, metals, and semiconductors), adequate for the above purpose, are considered in different structure combinations, and their optical response are analyzed.
© 1998 Optical Society of America
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.4800) Instrumentation, measurement, and metrology : Optical standards and testing
Stoyan C. Russev, Jean-Pierre Drolet, and Daniel Ducharme, "Standards for Which the Ellipsometric Parameter ψ Remains Insensitive to Variations in the Angle of Incidence," Appl. Opt. 37, 5912-5922 (1998)