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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 37, Iss. 25 — Sep. 1, 1998
  • pp: 5912–5922

Standards for which the ellipsometric parameter Ψ remains insensitive to variations in the angle of incidence

Stoyan C. Russev, Jean-Pierre Drolet, and Daniel Ducharme  »View Author Affiliations


Applied Optics, Vol. 37, Issue 25, pp. 5912-5922 (1998)
http://dx.doi.org/10.1364/AO.37.005912


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Abstract

We examine the possibility of using two- and three-phase systems suitable as standards for which the ellipsometric parameter Ψ remains insensitive to variations in the angle of incidence. These standards avoid propagation of errors in the angle of incidence with respect to the measured standard Ψ value. Different materials (dielectrics, metals, and semiconductors), adequate for the above purpose, are considered in different structure combinations, and their optical response are analyzed.

© 1998 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.4800) Instrumentation, measurement, and metrology : Optical standards and testing

History
Original Manuscript: February 2, 1998
Published: September 1, 1998

Citation
Stoyan C. Russev, Jean-Pierre Drolet, and Daniel Ducharme, "Standards for which the ellipsometric parameter Ψ remains insensitive to variations in the angle of incidence," Appl. Opt. 37, 5912-5922 (1998)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-37-25-5912

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