OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 37, Iss. 25 — Sep. 1, 1998
  • pp: 5951–5956

Pixel-based absolute topography test for three flats

Robert E. Parks, Lianzhen Shao, and Chris J. Evans  »View Author Affiliations


Applied Optics, Vol. 37, Issue 25, pp. 5951-5956 (1998)
http://dx.doi.org/10.1364/AO.37.005951


View Full Text Article

Enhanced HTML    Acrobat PDF (2518 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We demonstrate a method of performing the absolute three-flat test by using reflection symmetries of the surfaces and an algorithm for generating the rotation of arrays of pixel data. Most of the operations involve left/right and top/bottom flips of data arrays, operations that are very fast on most frame grabbers and are available on most commercial phase-measuring interferometers. We demonstrate the method with simulated data as well as with actual data from 150-mm-diameter surfaces that are flat to less than 25 nm peak to valley.

© 1998 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4630) Instrumentation, measurement, and metrology : Optical inspection

History
Original Manuscript: April 30, 1998
Revised Manuscript: November 26, 1998
Published: September 1, 1998

Citation
Robert E. Parks, Lianzhen Shao, and Chris J. Evans, "Pixel-based absolute topography test for three flats," Appl. Opt. 37, 5951-5956 (1998)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-37-25-5951

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited