C/Ti multilayers with a period thickness of 2.1–2.7 nm were produced by electron-beam evaporation in ultrahigh vacuum as soft-x-ray mirrors in the water window (λ = 2.3–4.4 nm). For smoothing the individual interfaces and thus enhancing the total reflectance, each layer was ion polished with an Ar+ ion beam after deposition. For a multilayer of 85 bilayers, a reflectance of approximately 11% at an angle of incidence of 59° (with respect to the surface normal) by use of s-polarized radiation at a wavelength of 2.77 nm was achieved.
© 1998 Optical Society of America
Hans-Juergen Stock, Gabriele Haindl, Frank Hamelmann, Detlef Menke, Oliver Wehmeyer, Ulf Kleineberg, Ulrich Heinzmann, Peter Bulicke, Detlev Fuchs, and Gerhard Ulm, "Carbon/Titanium Multilayers as Soft-X-Ray Mirrors for the Water Window," Appl. Opt. 37, 6002-6005 (1998)