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Applied Optics

Applied Optics


  • Vol. 37, Iss. 25 — Sep. 1, 1998
  • pp: 6002–6005

Carbon/titanium multilayers as soft-x-ray mirrors for the water window

Hans-Juergen Stock, Gabriele Haindl, Frank Hamelmann, Detlef Menke, Oliver Wehmeyer, Ulf Kleineberg, Ulrich Heinzmann, Peter Bulicke, Detlev Fuchs, and Gerhard Ulm  »View Author Affiliations

Applied Optics, Vol. 37, Issue 25, pp. 6002-6005 (1998)

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C/Ti multilayers with a period thickness of 2.1–2.7 nm were produced by electron-beam evaporation in ultrahigh vacuum as soft-x-ray mirrors in the water window (λ = 2.3–4.4 nm). For smoothing the individual interfaces and thus enhancing the total reflectance, each layer was ion polished with an Ar+ ion beam after deposition. For a multilayer of 85 bilayers, a reflectance of approximately 11% at an angle of incidence of 59° (with respect to the surface normal) by use of s-polarized radiation at a wavelength of 2.77 nm was achieved.

© 1998 Optical Society of America

OCIS Codes
(180.7460) Microscopy : X-ray microscopy
(230.4170) Optical devices : Multilayers
(310.1620) Thin films : Interference coatings
(340.7470) X-ray optics : X-ray mirrors

Original Manuscript: January 20, 1998
Revised Manuscript: May 15, 1998
Published: September 1, 1998

Hans-Juergen Stock, Gabriele Haindl, Frank Hamelmann, Detlef Menke, Oliver Wehmeyer, Ulf Kleineberg, Ulrich Heinzmann, Peter Bulicke, Detlev Fuchs, and Gerhard Ulm, "Carbon/titanium multilayers as soft-x-ray mirrors for the water window," Appl. Opt. 37, 6002-6005 (1998)

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