## Effects of Fabrication Errors on the Performance of Cylindrical Diffractive Lenses: Rigorous Boundary-Element Method and Scalar Approximation

Applied Optics, Vol. 37, Issue 28, pp. 6591-6602 (1998)

http://dx.doi.org/10.1364/AO.37.006591

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### Abstract

The effects of fabrication errors on the performance of collimating finite-thickness cylindrical diffractive lenses with eight discrete levels are investigated with a rigorous boundary-element method and a scalar approach. The photolithographic fabrication errors considered are mask alignment errors, exposure errors (that result in linewidth errors), and etch-depth errors. A cylindrical Gaussian beam of TE or TM polarization is incident upon the resulting lenses. Lenses of *F*/4, *F*/2, and *F*/1.4 are examined. The diffraction efficiencies of the lenses with fabrication errors are generally lower than the error-free lenses with the most severe performance degradation occurring for mask misalignment and exposure errors.

© 1998 Optical Society of America

**OCIS Codes**

(050.0050) Diffraction and gratings : Diffraction and gratings

(050.1940) Diffraction and gratings : Diffraction

(050.1970) Diffraction and gratings : Diffractive optics

(120.1680) Instrumentation, measurement, and metrology : Collimation

(350.3950) Other areas of optics : Micro-optics

**Citation**

Elias N. Glytsis, Michael E. Harrigan, Thomas K. Gaylord, and Koichi Hirayama, "Effects of Fabrication Errors on the Performance of Cylindrical Diffractive Lenses: Rigorous Boundary-Element Method and Scalar Approximation," Appl. Opt. **37**, 6591-6602 (1998)

http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-37-28-6591

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