The effects of fabrication errors on the performance of collimating finite-thickness cylindrical diffractive lenses with eight discrete levels are investigated with a rigorous boundary-element method and a scalar approach. The photolithographic fabrication errors considered are mask alignment errors, exposure errors (that result in linewidth errors), and etch-depth errors. A cylindrical Gaussian beam of TE or TM polarization is incident upon the resulting lenses. Lenses of F/4, F/2, and F/1.4 are examined. The diffraction efficiencies of the lenses with fabrication errors are generally lower than the error-free lenses with the most severe performance degradation occurring for mask misalignment and exposure errors.
© 1998 Optical Society of America
(050.0050) Diffraction and gratings : Diffraction and gratings
(050.1940) Diffraction and gratings : Diffraction
(050.1970) Diffraction and gratings : Diffractive optics
(120.1680) Instrumentation, measurement, and metrology : Collimation
(350.3950) Other areas of optics : Micro-optics
Elias N. Glytsis, Michael E. Harrigan, Thomas K. Gaylord, and Koichi Hirayama, "Effects of Fabrication Errors on the Performance of Cylindrical Diffractive Lenses: Rigorous Boundary-Element Method and Scalar Approximation," Appl. Opt. 37, 6591-6602 (1998)