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Applied Optics

Applied Optics


  • Vol. 37, Iss. 28 — Oct. 1, 1998
  • pp: 6696–6700

Analytical modeling of the periodic nonlinearity in heterodyne interferometry

Chien-Ming Wu and Richard D. Deslattes  »View Author Affiliations

Applied Optics, Vol. 37, Issue 28, pp. 6696-6700 (1998)

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The periodic nonlinearity that arises from nonideal laser sources and imperfections of optical components limits the accuracy of displacement measurements in heterodyne interferometry at the nanometer level. An analytical approach to investigating the nonlinearity is presented. Frequency mixing, polarization mixing, polarization–frequency mixing, and ghost reflections are all included in this investigation. A general form for the measurement signal, including that of the distortions, is given. The analytical approach is also applicable to homodyne interferometry.

© 1998 Optical Society of America

OCIS Codes
(100.2650) Image processing : Fringe analysis
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(190.0190) Nonlinear optics : Nonlinear optics

Original Manuscript: November 24, 1997
Revised Manuscript: March 19, 1998
Published: October 1, 1998

Chien-Ming Wu and Richard D. Deslattes, "Analytical modeling of the periodic nonlinearity in heterodyne interferometry," Appl. Opt. 37, 6696-6700 (1998)

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  1. R. C. Quenelle, “Nonlinearity in interferometer measurements,” Hewlett Packard J. 34, 10 (1983).
  2. C. M. Sutton, “Nonlinearity in length measurements using heterodyne laser Michelson interferometry,” J. Phys. E 20, 1290–1292 (1987). [CrossRef]
  3. N. Bobroff, “Residual errors in laser interferometry from air turbulence and nonlinearity,” Appl. Opt. 26, 2676–2681 (1987). [CrossRef] [PubMed]
  4. N. Bobroff, “Recent advances in displacement measuring interferometry,” Meas. Sci. Technol. 4, 907–926 (1993). [CrossRef]
  5. Y. Xie, Y.-Z. Wu, “Elliptical polarization and nonorthogonality of stabilized Zeeman laser output,” Appl. Opt. 28, 2043–2046 (1989). [CrossRef] [PubMed]
  6. Y. Xie, Y.-Z. Wu, “Zeeman laser interferometer errors for high-precision measurements,” Appl. Opt. 31, 881–884 (1992). [CrossRef] [PubMed]
  7. A. E. Rosenbluth, N. Bobroff, “Optical sources of nonlinearity in heterodyne interferometers,” Precision Eng. 12, 7–11 (1990). [CrossRef]
  8. A. Bergamin, G. Cavagnero, G. Mana, “Phase holonomy in optical interferometry,” J. Mod. Opt. 39, 2053–2074 (1992). [CrossRef]
  9. C. M. Wu, C. S. Su, “Nonlinearity in measurements of length by optical interferometry,” Meas. Sci. Technol. 7, 62–68 (1996). [CrossRef]
  10. W. Hou, G. Wilkening, “Investigation and compensation of the nonlinearity of heterodyne interferometers,” Precision Eng. 14, 91–98 (1992). [CrossRef]
  11. J. A. Stone, L. P. Howard, “A simple technique for observing periodic nonlinearities in Michelson interferometers,” Precision Eng. 22 (1998) in press.
  12. W. Hou, X. Zhao, “Drift of nonlinearity in the heterodyne interferometers,” Precision Eng. 16, 25–35 (1994). [CrossRef]
  13. M. A. Player, “Polarization properties of a cube-corner reflector,” J. Mod. Opt. 35, 1813–1820 (1988). [CrossRef]
  14. S. Patterson, J. Beckwith, “Reduction of systematic errors in heterodyne interferometric displacement measurement,” in International Progress in Precision Engineering, Procedings of the 8th International Precision Engineering Seminar, M. Bonis ed. (Elsevier, Amsterdam, 1995) pp. 101–104.

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