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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 37, Iss. 28 — Oct. 1, 1998
  • pp: 6716–6720

Ultrastable Absolute-Phase Common-Path Optical Profiler Based on Computer-Generated Holography

Nicolas B. E. Sawyer, Chung Wah See, Matthew Clark, Michael G. Somekh, and Jason Y. L. Goh  »View Author Affiliations


Applied Optics, Vol. 37, Issue 28, pp. 6716-6720 (1998)
http://dx.doi.org/10.1364/AO.37.006716


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Abstract

A new scanning common-path interferometric profiler capable of absolute-phase measurement is described. The key element is a computer-generated hologram, which acts as the beam-splitting element. Unlike most absolute phase systems, it can be made entirely common path with respect to piston microphonics and is thus exceptionally stable. In addition to operating in scanning mode, the optical configuration permits simultaneous operation as a single-shot phase measuring interferometer and is thus capable of simultaneous form and texture measurements. The operation and stability of the scanning profiler are demonstrated experimentally.

© 1998 Optical Society of America

OCIS Codes
(090.1970) Holography : Diffractive optics

Citation
Nicolas B. E. Sawyer, Chung Wah See, Matthew Clark, Michael G. Somekh, and Jason Y. L. Goh, "Ultrastable Absolute-Phase Common-Path Optical Profiler Based on Computer-Generated Holography," Appl. Opt. 37, 6716-6720 (1998)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-37-28-6716


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