OSA's Digital Library

Applied Optics

Applied Optics


  • Vol. 37, Iss. 28 — Oct. 1, 1998
  • pp: 6716–6720

Ultrastable absolute-phase common-path optical profiler based on computer-generated holography

Nicolas B. E. Sawyer, Chung Wah See, Matthew Clark, Michael G. Somekh, and Jason Y. L. Goh  »View Author Affiliations

Applied Optics, Vol. 37, Issue 28, pp. 6716-6720 (1998)

View Full Text Article

Enhanced HTML    Acrobat PDF (447 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



A new scanning common-path interferometric profiler capable of absolute-phase measurement is described. The key element is a computer-generated hologram, which acts as the beam-splitting element. Unlike most absolute phase systems, it can be made entirely common path with respect to piston microphonics and is thus exceptionally stable. In addition to operating in scanning mode, the optical configuration permits simultaneous operation as a single-shot phase measuring interferometer and is thus capable of simultaneous form and texture measurements. The operation and stability of the scanning profiler are demonstrated experimentally.

© 1998 Optical Society of America

OCIS Codes
(090.1970) Holography : Diffractive optics

Original Manuscript: June 15, 1998
Revised Manuscript: June 15, 1998
Published: October 1, 1998

Nicolas B. E. Sawyer, Chung Wah See, Matthew Clark, Michael G. Somekh, and Jason Y. L. Goh, "Ultrastable absolute-phase common-path optical profiler based on computer-generated holography," Appl. Opt. 37, 6716-6720 (1998)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. G. E. Sommargren, “Optical heterodyne profilometry,” Appl. Opt. 20, 610–618 (1981). [CrossRef] [PubMed]
  2. H. K. Wickramasinghe, S. Ameri, C. W. See, “Differential phase contrast microscope with 1Å depth resolution,” Electron. Lett. 18, 973–975 (1982). [CrossRef]
  3. M. B. Suddendorf, M. G. Somekh, C. W. See, “Single-probe-beam differential amplitude and phase scanning interferometer,” Appl. Opt. 36, 6202–6210 (1997). [CrossRef]
  4. C. C. Huang, “Optical heterodyne profilometer,” Opt. Eng. 23, 365–370 (1984). [CrossRef]
  5. M. J. Offside, M. G. Somekh, “Interferometric scanning optical microscope for surface characterization,” Appl. Opt. 31, 6772–6782 (1992). [CrossRef] [PubMed]
  6. Inasmuch as only a portion of the interferogram was used, the effective reference area was approximately 800 μm by 100 μm. This area was found to be satisfactory for our purposes, but by using several similar regions or a single larger region one could readily use a larger reference area.
  7. K. Creath, “Calibration of numerical aperture effects in interferometric microscope objectives,” Appl. Opt. 28, 3333–3338 (1989). [CrossRef] [PubMed]
  8. M. G. Somekh, M. S. Valera, R. K. Appel, “Scanning heterodyne confocal differential phase and intensity microscope,” Appl. Opt. 34, 4857–4868 (1995). [CrossRef] [PubMed]
  9. M. Takeda, H. Ina, S. Kobayashi, “Fourier transform method of fringe-pattern analysis for computer-based topography and interferometry,” J. Opt. Soc. Am. 72, 156–160 (1982). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


Fig. 1 Fig. 2 Fig. 3
Fig. 4 Fig. 5

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited