The accuracy and the measurement range of surface profilometry by wavelength scanning interferometry applied to diffusely reflecting surfaces are investigated. The influences of surface roughness and the imaging system in the interferometer are theoretically analyzed by derivation of the autocorrelation function of interferograms arising from wavelength scanning. By using a dye laser with a tuning range of 4.2 nm to a yield resolution of 39.1 μm, we have observed interferograms and their Fourier transforms and autocorrelations to study effects of defocusing and the size ratio of speckle to the CCD pixel for a plane diffuse object positioned normal to the incident beam.

© 1998 Optical Society of America

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

Related Journal Articles

• Reference-beam system for measuring relative small-surface local irregularities of a reflective object (AO)
• Speckle Interferometry with Temporal Phase Evaluation for Measuring Large-Object Deformation (AO)
• Optical Configuration in Speckle Shear Interferometry for Slope Change Contouring with a Twofold Increase in Sensitivity (AO)
• Speckle Interferometry with Temporal Phase Evaluation: Influence of Decorrelation, Speckle Size, and Nonlinearity of the Camera (AO)
• New feasibilities for characterizing rough surfaces by optical-correlation techniques (AO)

Related Conference Papers

• Using Near-Field Statistics for Interface Characterization
• A Novel Reconstruction Method for Weak-Phase Optical Interferometry
• Polarization diverse optical frequency domain interferometry: all coupler implementation
• Phase mask period characterization with picometer accuracy using Bragg gratings and diffractive interferometric technique
• Reset-free phase shifter in a Sagnac-type interferometer for control of chirp and apodization of Bragg gratings