We present a new finishing process that is capable of locally shaping and polishing optical surfaces of complex shapes. A fluid jet system is used to guide a premixed slurry at pressures less than 6 bars to the optical surface. We used a slurry comprising water and 10% #800 SiC abrasives (21.8 μm) to reduce the surface roughness of a BK7 sample from 350 to 25 nm rms and to vary the shape of a polished sample BK7, maintaining its surface roughness of 1.6 nm rms, thereby proving both the shaping and polishing possibilities of the presented method.
© 1998 Optical Society of America
Original Manuscript: February 23, 1998
Revised Manuscript: June 3, 1998
Published: October 1, 1998
Oliver W. Fähnle, Hedser van Brug, and Hans J. Frankena, "Fluid jet polishing of optical surfaces," Appl. Opt. 37, 6771-6773 (1998)