The design and implementation of a prototype time-of-flight optical ranging system based on the time-correlated single-photon-counting technique are described. The sensor is characterized in terms of its longitudinal and transverse spatial resolution, single-point measurement time, and long-term stability. The system has been operated at stand-off distances of 0.5–5 m, has a depth repeatability of <30 μm, and has a lateral spatial resolution of <500 μm.
© 1998 Optical Society of America
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(150.5670) Machine vision : Range finding
(150.6910) Machine vision : Three-dimensional sensing
(280.3400) Remote sensing and sensors : Laser range finder
John S. Massa, Gerald S. Buller, Andrew C. Walker, Sergio Cova, Manikam Umasuthan, and Andrew M. Wallace, "Time-of-Flight Optical Ranging System Based on Time-Correlated Single-Photon Counting," Appl. Opt. 37, 7298-7304 (1998)