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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 37, Iss. 34 — Dec. 1, 1998
  • pp: 8002–8007

Groove profile modification of blazed gratings by dip coating with hardenable liquids

Karlfrid Osterried, Klaus Frieder Heidemann, and Bruno Nelles  »View Author Affiliations


Applied Optics, Vol. 37, Issue 34, pp. 8002-8007 (1998)
http://dx.doi.org/10.1364/AO.37.008002


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Abstract

We modify groove profile of various blazed gratings with groove densities as great as 3600 lines/mm by dip coating with hardenable liquids with the aim of reducing the blaze angle. The groove profiles resulting from coatings with different layer thickness are measured by atomic force microscopy. A highly reproducible blaze angle reduction to as high as a factor of 6 is achieved with mechanically ruled as well as ion-beam-etched holographic blazed gratings. Blaze angles, to as small as 0.7 deg, which are required for vacuum-UV and soft-x-ray applications but can hardly be formed with sufficient groove profile accuracy by direct ruling, are realized with this coating technique.

© 1998 Optical Society of America

OCIS Codes
(050.1960) Diffraction and gratings : Diffraction theory
(220.4000) Optical design and fabrication : Microstructure fabrication
(240.5770) Optics at surfaces : Roughness
(260.7200) Physical optics : Ultraviolet, extreme
(310.6870) Thin films : Thin films, other properties

History
Original Manuscript: March 16, 1998
Published: December 1, 1998

Citation
Karlfrid Osterried, Klaus Frieder Heidemann, and Bruno Nelles, "Groove profile modification of blazed gratings by dip coating with hardenable liquids," Appl. Opt. 37, 8002-8007 (1998)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-37-34-8002

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