Freestanding, Micromachined, Multimode Silicon Optical Waveguides at λ = 1.3 μm for Microelectromechanical Systems Technology
Applied Optics, Vol. 37, Issue 36, pp. 8397-8399 (1998)
http://dx.doi.org/10.1364/AO.37.008397
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Abstract
Freestanding, multimode optical channel waveguides formed by micromachining silicon are demonstrated. Fabrication utilizes standard microelectromechanical systems (MEMS) technology. Losses in the 0.57–0.80-dB/cm range are measured for channel waveguides with an air–silicon–air structure, whereas losses in the 1.12–1.52-dB/cm range are measured for channel waveguides with a SiO2–silicon–SiO2 structure. Freestanding channel waveguides, along with optical fibers and other MEMS structures, can readily be mounted on a silicon MEMS platform to provide optimal alignment for maximizing optical coupling, and they are thus expected to be useful in devices that involve light and MEMS structures.
© 1998 Optical Society of America
OCIS Codes
(130.2790) Integrated optics : Guided waves
(130.5990) Integrated optics : Semiconductors
Citation
Kevin E. Burcham and Joseph T. Boyd, "Freestanding, Micromachined, Multimode Silicon Optical Waveguides at λ = 1.3 μm for Microelectromechanical Systems Technology," Appl. Opt. 37, 8397-8399 (1998)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-37-36-8397
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