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Applied Optics

Applied Optics


  • Vol. 37, Iss. 36 — Dec. 20, 1998
  • pp: 8397–8399

Freestanding, micromachined, multimode silicon optical waveguides at λ = 1.3 μm for microelectromechanical systems technology

Kevin E. Burcham and Joseph T. Boyd  »View Author Affiliations

Applied Optics, Vol. 37, Issue 36, pp. 8397-8399 (1998)

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Freestanding, multimode optical channel waveguides formed by micromachining silicon are demonstrated. Fabrication utilizes standard microelectromechanical systems (MEMS) technology. Losses in the 0.57–0.80-dB/cm range are measured for channel waveguides with an air–silicon–air structure, whereas losses in the 1.12–1.52-dB/cm range are measured for channel waveguides with a SiO2–silicon–SiO2 structure. Freestanding channel waveguides, along with optical fibers and other MEMS structures, can readily be mounted on a silicon MEMS platform to provide optimal alignment for maximizing optical coupling, and they are thus expected to be useful in devices that involve light and MEMS structures.

© 1998 Optical Society of America

OCIS Codes
(130.2790) Integrated optics : Guided waves
(130.5990) Integrated optics : Semiconductors

Original Manuscript: June 4, 1998
Revised Manuscript: September 29, 1998
Published: December 20, 1998

Kevin E. Burcham and Joseph T. Boyd, "Freestanding, micromachined, multimode silicon optical waveguides at λ = 1.3 μm for microelectromechanical systems technology," Appl. Opt. 37, 8397-8399 (1998)

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