Microlenses and Microlens Arrays Formed on a Glass Plate by Use of a CO2 Laser
Applied Optics, Vol. 37, Issue 4, pp. 627-631 (1998)
http://dx.doi.org/10.1364/AO.37.000627
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Abstract
Microlenses and microlens arrays were formed directly on a surface of a glass plate by use of a CO2 laser. When the surface of a glass plate is heated locally to a working point of the glass material by use of a focused CO2 laser beam, it tends to become a hyperboloid owing to surface tension, which results in a microlens. A profile of the microlens was measured with an ultrahigh accurate three-dimensional profilometer (Model UA3P, Matsusita Electric Industrial Company Ltd.) that utilizes a specially designed atomic force microscope. An intensity profile and a spot diameter at the focus of the microlens were measured with a microscope and a CCD system utilizing a He–Ne laser as a light source. The focused spot FWHM diameter of 1.35 μm was obtained, and the modulation transfer function was derived from the spot profile. Microlens arrays were also fabricated and characterized.
© 1998 Optical Society of America
[Optical Society of America ]
OCIS Codes
(040.1240) Detectors : Arrays
(140.3470) Lasers and laser optics : Lasers, carbon dioxide
(350.3950) Other areas of optics : Micro-optics
Citation
M. Wakaki, Y. Komachi, and G. Kanai, "Microlenses and Microlens Arrays Formed on a Glass Plate by Use of a CO2 Laser," Appl. Opt. 37, 627-631 (1998)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-37-4-627
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