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Applied Optics

Applied Optics


  • Vol. 37, Iss. 4 — Feb. 1, 1998
  • pp: 627–631

Microlenses and microlens arrays formed on a glass plate by use of a CO2 laser

M. Wakaki, Y. Komachi, and G. Kanai  »View Author Affiliations

Applied Optics, Vol. 37, Issue 4, pp. 627-631 (1998)

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Microlenses and microlens arrays were formed directly on a surface of a glass plate by use of a CO2 laser. When the surface of a glass plate is heated locally to a working point of the glass material by use of a focused CO2 laser beam, it tends to become a hyperboloid owing to surface tension, which results in a microlens. A profile of the microlens was measured with an ultrahigh accurate three-dimensional profilometer (Model UA3P, Matsusita Electric Industrial Company Ltd.) that utilizes a specially designed atomic force microscope. An intensity profile and a spot diameter at the focus of the microlens were measured with a microscope and a CCD system utilizing a He–Ne laser as a light source. The focused spot FWHM diameter of 1.35 μm was obtained, and the modulation transfer function was derived from the spot profile. Microlens arrays were also fabricated and characterized.

© 1998 Optical Society of America

OCIS Codes
(040.1240) Detectors : Arrays
(140.3470) Lasers and laser optics : Lasers, carbon dioxide
(350.3950) Other areas of optics : Micro-optics

Original Manuscript: March 3, 1997
Revised Manuscript: June 23, 1997
Published: February 1, 1998

M. Wakaki, Y. Komachi, and G. Kanai, "Microlenses and microlens arrays formed on a glass plate by use of a CO2 laser," Appl. Opt. 37, 627-631 (1998)

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