OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 37, Iss. 4 — Feb. 1, 1998
  • pp: 676–682

Testing refractive silicon microlenses by use of a lateral shearing interferometer in transmission

Lars Erdmann and Richard Kowarschik  »View Author Affiliations


Applied Optics, Vol. 37, Issue 4, pp. 676-682 (1998)
http://dx.doi.org/10.1364/AO.37.000676


View Full Text Article

Enhanced HTML    Acrobat PDF (1880 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Wave aberrations of refractive photoresist microlenses and silicon microlenses were measured with a lateral shearing interferometer. Because of the silicon elements, a near-infrared working wavelength (λ = 1.32 μm) was used. The wave front was evaluated by a phase step technique with four steps. Integration of the phase distributions was performed with a computationally efficient Fourier transformation algorithm. The influence of the detector vidicon nonlinearity on the measured wave front was calculated. The defocusing behavior of the interferometer was investigated by fitting the measured wave fronts with the help of Zernike circle polynomials. It is shown that the reproducibility can be kept below λ/100 rms. Examples for the measured wave fronts of plano–convex silicon microlenses are discussed in detail.

© 1998 Optical Society of America

OCIS Codes
(070.5040) Fourier optics and signal processing : Phase conjugation
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(350.3950) Other areas of optics : Micro-optics

History
Original Manuscript: April 7, 1997
Revised Manuscript: July 17, 1997
Published: February 1, 1998

Citation
Lars Erdmann and Richard Kowarschik, "Testing of refractive silicon microlenses by use of a lateral shearing interferometer in transmission," Appl. Opt. 37, 676-682 (1998)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-37-4-676

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited