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Applied Optics

Applied Optics


  • Vol. 37, Iss. 4 — Feb. 1, 1998
  • pp: 676–682

Testing refractive silicon microlenses by use of a lateral shearing interferometer in transmission

Lars Erdmann and Richard Kowarschik  »View Author Affiliations

Applied Optics, Vol. 37, Issue 4, pp. 676-682 (1998)

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Wave aberrations of refractive photoresist microlenses and silicon microlenses were measured with a lateral shearing interferometer. Because of the silicon elements, a near-infrared working wavelength (λ = 1.32 μm) was used. The wave front was evaluated by a phase step technique with four steps. Integration of the phase distributions was performed with a computationally efficient Fourier transformation algorithm. The influence of the detector vidicon nonlinearity on the measured wave front was calculated. The defocusing behavior of the interferometer was investigated by fitting the measured wave fronts with the help of Zernike circle polynomials. It is shown that the reproducibility can be kept below λ/100 rms. Examples for the measured wave fronts of plano–convex silicon microlenses are discussed in detail.

© 1998 Optical Society of America

OCIS Codes
(070.5040) Fourier optics and signal processing : Phase conjugation
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(350.3950) Other areas of optics : Micro-optics

Original Manuscript: April 7, 1997
Revised Manuscript: July 17, 1997
Published: February 1, 1998

Lars Erdmann and Richard Kowarschik, "Testing of refractive silicon microlenses by use of a lateral shearing interferometer in transmission," Appl. Opt. 37, 676-682 (1998)

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