The process-parameter-dependent optical and structural properties of ZrO<sub>2</sub>MgO mixed-composite material have been investigated. Optical properties were derived from spectrophotometric measurements. By use of atomic force microscopy, x-ray diffraction analysis, and energy-dispersive x-ray (EDX) analysis, the surface morphology, grain size distributions, crystallographic phases, and process-dependent material composition of films have been investigated. EDX analysis made evident the correlation between the oxygen enrichment in the films prepared at a high level of oxygen pressure and the very low refractive index. Since oxygen pressure can be dynamically varied during a deposition process, coatings constructed of suitable mixed-composite thin films can benefit from continuous modulation of the index of refraction. A step modulation approach is used to develop various multilayer-equivalent thin-film devices.
© 1998 Optical Society of America
(160.4670) Materials : Optical materials
(240.0310) Optics at surfaces : Thin films
(310.1620) Thin films : Interference coatings
(310.1860) Thin films : Deposition and fabrication
(310.3840) Thin films : Materials and process characterization
N. K. Sahoo and A. P. Shapiro, "Process-Parameter-Dependent Optical and Structural Properties of ZrO2 MgO Mixed-Composite Films Evaporated from the Solid Solution," Appl. Opt. 37, 698-718 (1998)