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Applied Optics

Applied Optics


  • Vol. 37, Iss. 4 — Feb. 1, 1998
  • pp: 719–728

Cr/Sc multilayers for the soft-x-ray range

Franz Schäfers, Hans-Christoph Mertins, Frank Schmolla, Ingo Packe, Nikolay N. Salashchenko, and Eugeny A. Shamov  »View Author Affiliations

Applied Optics, Vol. 37, Issue 4, pp. 719-728 (1998)

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We have systematically investigated ultrathin Cr/Sc multilayers (nanolayers), using tunable soft-x-ray synchrotron radiation. The multilayers were optimized for use either in normal incidence or at 45° at photon energies around the 2p-absorption edges of Sc (399 eV) and Cr (574 eV), respectively. They were sputter deposited on Si wafers or on thin Si3N4-membrane support structures for use in reflection and in transmission, respectively, as polarizing and phase-retarding elements in a polarimeter. The performance theoretically expected with respect to reflection/transmission and energy resolution has been confirmed experimentally: A value of 7% for the normal-incidence peak reflectance at 395 eV was measured as well as a pronounced minimum in transmission for certain incidence angles and energies below the respective absorption edges, indicating significant phase-shifting effects.

© 1998 Optical Society of America

OCIS Codes
(120.5700) Instrumentation, measurement, and metrology : Reflection
(120.7000) Instrumentation, measurement, and metrology : Transmission
(230.4170) Optical devices : Multilayers
(350.5610) Other areas of optics : Radiation

Original Manuscript: June 27, 1997
Revised Manuscript: October 8, 1997
Published: February 1, 1998

Franz Schäfers, Hans-Christoph Mertins, Frank Schmolla, Ingo Packe, Nikolay N. Salashchenko, and Eugeny A. Shamov, "Cr/Sc multilayers for the soft-x-ray range," Appl. Opt. 37, 719-728 (1998)

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