Buried channel optical waveguides were fabricated from fluorinated polyimides. They operated in single mode and showed an optical loss of less than 0.3 and 0.7 dB/cm for TE and TM polarizations, respectively, at a wavelength of 1.3 μm. Moreover, these waveguides had high heat and moisture resistance; the optical loss did not significantly change after heating at 380 °C for 1 h or after exposure to 85% relative humidity at 85 °C for over 200 h.
© 1998 Optical Society of America
Original Manuscript: March 10, 1997
Revised Manuscript: July 7, 1997
Published: February 20, 1998
Junya Kobayashi, Tohru Matsuura, Shigekuni Sasaki, and Tohru Maruno, "Single-mode optical waveguides fabricated from fluorinated polyimides," Appl. Opt. 37, 1032-1037 (1998)