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Applied Optics

Applied Optics


  • Vol. 37, Iss. 6 — Feb. 20, 1998
  • pp: 1032–1037

Single-mode optical waveguides fabricated from fluorinated polyimides

Junya Kobayashi, Tohru Matsuura, Shigekuni Sasaki, and Tohru Maruno  »View Author Affiliations

Applied Optics, Vol. 37, Issue 6, pp. 1032-1037 (1998)

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Buried channel optical waveguides were fabricated from fluorinated polyimides. They operated in single mode and showed an optical loss of less than 0.3 and 0.7 dB/cm for TE and TM polarizations, respectively, at a wavelength of 1.3 μm. Moreover, these waveguides had high heat and moisture resistance; the optical loss did not significantly change after heating at 380 °C for 1 h or after exposure to 85% relative humidity at 85 °C for over 200 h.

© 1998 Optical Society of America

OCIS Codes
(130.0130) Integrated optics : Integrated optics
(230.7370) Optical devices : Waveguides

Original Manuscript: March 10, 1997
Revised Manuscript: July 7, 1997
Published: February 20, 1998

Junya Kobayashi, Tohru Matsuura, Shigekuni Sasaki, and Tohru Maruno, "Single-mode optical waveguides fabricated from fluorinated polyimides," Appl. Opt. 37, 1032-1037 (1998)

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