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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 37, Iss. 7 — Mar. 1, 1998
  • pp: 1135–1139

Reference-beam system for measuring relative small-surface local irregularities of a reflective object

Moisés Cywiak and Cristina Solano  »View Author Affiliations


Applied Optics, Vol. 37, Issue 7, pp. 1135-1139 (1998)
http://dx.doi.org/10.1364/AO.37.001135


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Abstract

We present an optical technique for measuring irregularities on a small local surface (≈λ/100). This new technique uses a narrow laser beam as a local probe. The probe beam interferes with a reference beam. We use a 90° phase delay on the reference beam to increase the sensitivity. We show that if the test surface vibrates laterally, the collected power of the interferogram encodes as amplitude modulations, on a sinusoidal temporal carrier, the local surface irregularities.

© 1998 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4820) Instrumentation, measurement, and metrology : Optical systems
(240.6700) Optics at surfaces : Surfaces

Citation
Moisés Cywiak and Cristina Solano, "Reference-beam system for measuring relative small-surface local irregularities of a reflective object," Appl. Opt. 37, 1135-1139 (1998)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-37-7-1135


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References

  1. J. M. Bennett, “Measurement of the rms roughness, autocovariance function and other statistical properties of optical surfaces using a FECO scanning interferometer,” Appl. Opt. 15, 2705–2721 (1976).
  2. J. Mignot and C. Gorecki, “Measurement of surface roughness comparison between a defect of focus optical technique and the classical stylus technique,” Wear 87, 39–49 (1993).
  3. J. C. Stover and S. A. Serati, “Calculation of surface statistics from light scatter,” Opt. Eng. 23, 406–412 (1984).
  4. G. E. Sommargren, “Optical heterodyne profilometry,” Appl. Opt. 20, 610–618 (1981).
  5. W. M. Shi, S.-P. Lim and K. S. Lee, “Surface roughness classification using pattern recognition theory,” Opt. Eng. 34, 1756–1760 (1995).

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