Reference-beam system for measuring relative small-surface local irregularities of a reflective object
Applied Optics, Vol. 37, Issue 7, pp. 1135-1139 (1998)
http://dx.doi.org/10.1364/AO.37.001135
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Abstract
We present an optical technique for measuring irregularities on a small local surface (≈λ/100). This new technique uses a narrow laser beam as a local probe. The probe beam interferes with a reference beam. We use a 90° phase delay on the reference beam to increase the sensitivity. We show that if the test surface vibrates laterally, the collected power of the interferogram encodes as amplitude modulations, on a sinusoidal temporal carrier, the local surface irregularities.
© 1998 Optical Society of America
OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4820) Instrumentation, measurement, and metrology : Optical systems
(240.6700) Optics at surfaces : Surfaces
Citation
Moisés Cywiak and Cristina Solano, "Reference-beam system for measuring relative small-surface local irregularities of a reflective object," Appl. Opt. 37, 1135-1139 (1998)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-37-7-1135
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