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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 37, Iss. 7 — Mar. 1, 1998
  • pp: 1135–1139

Reference-beam system for measuring relative small-surface local irregularities of a reflective object

Moisés Cywiak and Cristina Solano  »View Author Affiliations


Applied Optics, Vol. 37, Issue 7, pp. 1135-1139 (1998)
http://dx.doi.org/10.1364/AO.37.001135


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Abstract

We present an optical technique for measuring irregularities on a small local surface (≈λ/100). This new technique uses a narrow laser beam as a local probe. The probe beam interferes with a reference beam. We use a 90° phase delay on the reference beam to increase the sensitivity. We show that if the test surface vibrates laterally, the collected power of the interferogram encodes as amplitude modulations, on a sinusoidal temporal carrier, the local surface irregularities.

© 1998 Optical Society of America

OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.4530) Instrumentation, measurement, and metrology : Optical constants
(310.0310) Thin films : Thin films

History
Original Manuscript: November 18, 1996
Revised Manuscript: October 8, 1997
Published: March 1, 1998

Citation
Moisés Cywiak and Cristina Solano, "Reference-beam system for measuring relative small-surface local irregularities of a reflective object," Appl. Opt. 37, 1135-1139 (1998)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-37-7-1135


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References

  1. J. M. Bennett, “Measurement of the rms roughness, autocovariance function and other statistical properties of optical surfaces using a FECO scanning interferometer,” Appl. Opt. 15, 2705–2721 (1976). [CrossRef] [PubMed]
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  3. J. C. Stover, S. A. Serati, “Calculation of surface statistics from light scatter,” Opt. Eng. 23, 406–412 (1984). [CrossRef]
  4. G. E. Sommargren, “Optical heterodyne profilometry,” Appl. Opt. 20, 610–618 (1981). [CrossRef] [PubMed]
  5. W. M. Shi, S.-P. Lim, K. S. Lee, “Surface roughness classification using pattern recognition theory,” Opt. Eng. 34, 1756–1760 (1995). [CrossRef]

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