Abstract
We have developed a diffractive micromachined chopper (DMC) for an IR wavelength of ∼10 μm. This device operates mechanically by movable reflection grating beams. It modulates the diffraction efficiency by controlling the displacement of grating beams by an electrostatic force. For a CO2 laser beam, a high modulation efficiency of 84% with an -0.8-dB small insertion loss was obtained by detecting 0th-order diffracted light. A novel pyroelectric IR microsensor with a DMC and a diffractive multilevel Si microlens was proposed and it demonstrated the detection of human existence.
© 1998 Optical Society of America
Full Article | PDF ArticleMore Like This
Gregory N. De Brabander, Glenn Beheim, and Joseph T. Boyd
Appl. Opt. 37(15) 3264-3267 (1998)
Bin Xu, Qinqin Wu, and Yuanqing Wang
Appl. Opt. 58(27) 7466-7471 (2019)
Jerald A. Britten and Leslie J. Summers
Appl. Opt. 37(30) 7049-7054 (1998)