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Applied Optics

Applied Optics


  • Vol. 37, Iss. 7 — Mar. 1, 1998
  • pp: 1165–1170

High-efficiency diffractive micromachined chopper for infrared wavelength and its application to a pyroelectric infrared sensor

Michihito Ueda, Teruhiro Shiono, Tatsuo Ito, and Kazuo Yokoyama  »View Author Affiliations

Applied Optics, Vol. 37, Issue 7, pp. 1165-1170 (1998)

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We have developed a diffractive micromachined chopper (DMC) for an IR wavelength of ∼10 μm. This device operates mechanically by movable reflection grating beams. It modulates the diffraction efficiency by controlling the displacement of grating beams by an electrostatic force. For a CO2 laser beam, a high modulation efficiency of 84% with an -0.8-dB small insertion loss was obtained by detecting 0th-order diffracted light. A novel pyroelectric IR microsensor with a DMC and a diffractive multilevel Si microlens was proposed and it demonstrated the detection of human existence.

© 1998 Optical Society of America

OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(130.3060) Integrated optics : Infrared
(130.6010) Integrated optics : Sensors

Original Manuscript: June 10, 1997
Revised Manuscript: October 8, 1997
Published: March 1, 1998

Michihito Ueda, Teruhiro Shiono, Tatsuo Ito, and Kazuo Yokoyama, "High-efficiency diffractive micromachined chopper for infrared wavelength and its application to a pyroelectric infrared sensor," Appl. Opt. 37, 1165-1170 (1998)

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