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Applied Optics

Applied Optics


  • Vol. 37, Iss. 7 — Mar. 1, 1998
  • pp: 1177–1179

Numerical algorithm for spectroscopic ellipsometry of thick transparent films

Salvador Bosch, Julio Pérez, and Adolf Canillas  »View Author Affiliations

Applied Optics, Vol. 37, Issue 7, pp. 1177-1179 (1998)

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We present a numerical method for spectroscopic ellipsometry of thick transparent films. When an analytical expression for the dispersion of the refractive index (which contains several unknown coefficients) is assumed, the procedure is based on fitting the coefficients at a fixed thickness. Then the thickness is varied within a range (according to its approximate value). The final result given by our method is as follows: The sample thickness is considered to be the one that gives the best fitting. The refractive index is defined by the coefficients obtained for this thickness.

© 1998 Optical Society of America

OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.4530) Instrumentation, measurement, and metrology : Optical constants
(310.0310) Thin films : Thin films

Original Manuscript: June 24, 1997
Revised Manuscript: October 14, 1997
Published: March 1, 1998

Salvador Bosch, Julio Pérez, and Adolf Canillas, "Numerical algorithm for spectroscopic ellipsometry of thick transparent films," Appl. Opt. 37, 1177-1179 (1998)

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  1. S. Guo, G. Gustafsson, O. J. Hagel, H. Arwin, “Determination of refractive index and thickness of thick transparent films by variable-angle spectroscopic ellipsometry: application to beczocyclobutene films,” Appl. Opt. 35, 1693–1699 (1996). [CrossRef] [PubMed]
  2. S. Bosch, F. Monzonís, E. Masetti, “Ellipsometric methods for absorbing layers: a modified downhill simplex algorithm,” Thin Solid Films 289, 54–58 (1996). [CrossRef]
  3. W. H. Press, S. A. Teukolsky, W. T. Wetterling, B. P. Flannery, Numerical Recipes in C, 2nd ed. (Cambridge U. Press, Cambridge, England, 1992), Chaps. 10 and 15.

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