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Applied Optics

Applied Optics


  • Vol. 38, Iss. 1 — Jan. 1, 1999
  • pp: 121–125

Testing of rod objects by grazing-incidence interferometry: experiment

Sven Brinkmann, Thomas Dresel, Roland Schreiner, and Johannes Schwider  »View Author Affiliations

Applied Optics, Vol. 38, Issue 1, pp. 121-125 (1999)

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A grazing-incidence interferometer for the testing of technical surfaces for macroscopic surface deviations is described. Computer-generated holograms serve as beam splitters and references for the workpieces tested. The sensitivity of the interferometer depends on the period of the computer-generated holograms. The method is demonstrated at a rod object of convex profile. Using phase-stepping techniques, the grazing-incidence interferometer provides fast measurements of the entire mantle surface of the test sample with submicrometer precision.

© 1999 Optical Society of America

OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure

Original Manuscript: March 13, 1998
Revised Manuscript: August 12, 1998
Published: January 1, 1999

Sven Brinkmann, Thomas Dresel, Roland Schreiner, and Johannes Schwider, "Testing of rod objects by grazing-incidence interferometry: experiment," Appl. Opt. 38, 121-125 (1999)

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