A grazing-incidence interferometer for the testing of technical surfaces for macroscopic surface deviations is described. Computer-generated holograms serve as beam splitters and references for the workpieces tested. The sensitivity of the interferometer depends on the period of the computer-generated holograms. The method is demonstrated at a rod object of convex profile. Using phase-stepping techniques, the grazing-incidence interferometer provides fast measurements of the entire mantle surface of the test sample with submicrometer precision.
© 1999 Optical Society of America
(050.1970) Diffraction and gratings : Diffractive optics
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
Sven Brinkmann, Thomas Dresel, Roland Schreiner, and Johannes Schwider, "Testing of Rod Objects by Grazing-Incidence Interferometry: Experiment," Appl. Opt. 38, 121-125 (1999)