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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 38, Iss. 10 — Apr. 1, 1999
  • pp: 1959–1967

Measurement of changes in optical path length and reflectivity with phase-shifting laser feedback interferometry

Ben Ovryn and James H. Andrews  »View Author Affiliations


Applied Optics, Vol. 38, Issue 10, pp. 1959-1967 (1999)
http://dx.doi.org/10.1364/AO.38.001959


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Abstract

The operating characteristics of a novel phase-shifting interferometer are presented. Interference arises by reflecting the light from a sample back into the cavity of a cw He–Ne laser. Changes in phase and fringe visibility are calculated from an overdetermined set of phase-shifted intensity measurements with the phase shifts being introduced with an electro-optic modulator. The interferometer is sensitive enough to measure displacements below 1 Hz with a rms error of approximately 1 nm from a sample that reflects only 3% of the 28 µW that is incident on its surface. The interferometer is applied to the determination of cantilever bending of a piezoelectric bimorph.

© 1999 Optical Society of America

OCIS Codes
(110.0180) Imaging systems : Microscopy
(110.6880) Imaging systems : Three-dimensional image acquisition
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(180.3170) Microscopy : Interference microscopy

History
Original Manuscript: September 2, 1998
Revised Manuscript: January 4, 1999
Published: April 1, 1999

Citation
Ben Ovryn and James H. Andrews, "Measurement of changes in optical path length and reflectivity with phase-shifting laser feedback interferometry," Appl. Opt. 38, 1959-1967 (1999)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-38-10-1959

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