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Applied Optics


  • Vol. 38, Iss. 10 — Apr. 1, 1999
  • pp: 2018–2027

Absolute measurement of planarity with Fritz’s method: uncertainty evaluation

Vincenzo Greco, Riccardo Tronconi, Ciro Del Vecchio, Marcelo Trivi, and Giuseppe Molesini  »View Author Affiliations

Applied Optics, Vol. 38, Issue 10, pp. 2018-2027 (1999)

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Fritz’s method [Opt. Eng. 23, 379 (1984)] of using Zernike polynomials to assess the absolute planarity of test plates is revisited. A refinement is described that takes into account the data decorrelation that appears in experiments. An uncertainty balance is defined by propagation of error contributions through the steps of the method. The resultant measuring procedure is demonstrated on a data set from experiments, and a nanometer level of uncertainty is achieved.

© 1999 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4800) Instrumentation, measurement, and metrology : Optical standards and testing
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure

Original Manuscript: October 5, 1998
Revised Manuscript: December 22, 1998
Published: April 1, 1999

Vincenzo Greco, Riccardo Tronconi, Ciro Del Vecchio, Marcelo Trivi, and Giuseppe Molesini, "Absolute measurement of planarity with Fritz’s method: uncertainty evaluation," Appl. Opt. 38, 2018-2027 (1999)

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