Silicon nitrides are synthesized by ion-assisted deposition with only one coating material and a nitrogen-ion-beam source. All the SiN x films are amorphous and mechanically strong. A wide range of refractive indices from 3.43 to 1.72 at a wavelength of 1550 nm is obtained. Near-IR antireflection coating and a bandpass filter based on the multilayers of SiN x and Si are demonstrated.
© 1999 Optical Society of America
Original Manuscript: August 10, 1998
Revised Manuscript: December 17, 1998
Published: April 1, 1999
Cheng-Chung Lee, Hsuen-Li Chen, Jin-Cherng Hsu, and Chuen-Lin Tien, "Interference coatings based on synthesized silicon nitride," Appl. Opt. 38, 2078-2082 (1999)