Silicon nitrides are synthesized by ion-assisted deposition with only one coating material and a nitrogen-ion-beam source. All the SiN<sub><i>x</i></sub> films are amorphous and mechanically strong. A wide range of refractive indices from 3.43 to 1.72 at a wavelength of 1550 nm is obtained. Near-IR antireflection coating and a bandpass filter based on the multilayers of SiN<sub><i>x</i></sub> and Si are demonstrated.
© 1999 Optical Society of America
Cheng-Chung Lee, Hsuen-Li Chen, Jin-Cherng Hsu, and Chuen-Lin Tien, "Interference Coatings Based on Synthesized Silicon Nitride," Appl. Opt. 38, 2078-2082 (1999)