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Applied Optics

Applied Optics


  • Vol. 38, Iss. 10 — Apr. 1, 1999
  • pp: 2078–2082

Interference coatings based on synthesized silicon nitride

Cheng-Chung Lee, Hsuen-Li Chen, Jin-Cherng Hsu, and Chuen-Lin Tien  »View Author Affiliations

Applied Optics, Vol. 38, Issue 10, pp. 2078-2082 (1999)

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Silicon nitrides are synthesized by ion-assisted deposition with only one coating material and a nitrogen-ion-beam source. All the SiN x films are amorphous and mechanically strong. A wide range of refractive indices from 3.43 to 1.72 at a wavelength of 1550 nm is obtained. Near-IR antireflection coating and a bandpass filter based on the multilayers of SiN x and Si are demonstrated.

© 1999 Optical Society of America

OCIS Codes
(310.0310) Thin films : Thin films
(310.1620) Thin films : Interference coatings
(310.1860) Thin films : Deposition and fabrication
(310.6860) Thin films : Thin films, optical properties

Original Manuscript: August 10, 1998
Revised Manuscript: December 17, 1998
Published: April 1, 1999

Cheng-Chung Lee, Hsuen-Li Chen, Jin-Cherng Hsu, and Chuen-Lin Tien, "Interference coatings based on synthesized silicon nitride," Appl. Opt. 38, 2078-2082 (1999)

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