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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 38, Iss. 13 — May. 1, 1999
  • pp: 2837–2842

Optical roughness measurements with fringe projection

Robert Windecker, Stefan Franz, and Hans J. Tiziani  »View Author Affiliations


Applied Optics, Vol. 38, Issue 13, pp. 2837-2842 (1999)
http://dx.doi.org/10.1364/AO.38.002837


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Abstract

The characterization of roughness of engineering surfaces over an area is an important task for different applications as well as for manufacturing processes. The surface roughness is in particular an important factor in determining the performance of a workpiece. We demonstrate that the fringe projection technique allows very fast three-dimensional surface inspections. The inspection time for an entire measurement is reduced to less than 5 s with standard hardware. Based on a zoom stereo microscope setup, we demonstrate a modular measuring instrument. The magnification-dependent vertical resolution can be as high as 0.1 µm. The special properties for roughness measurements are demonstrated, especially the comparability with a tactile sensor and with other optical sensors, which is discussed in connection with amplitude parameters.

© 1999 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.4120) Instrumentation, measurement, and metrology : Moire' techniques
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(180.6900) Microscopy : Three-dimensional microscopy
(240.5770) Optics at surfaces : Roughness

History
Original Manuscript: December 2, 1998
Revised Manuscript: February 10, 1999
Published: May 1, 1999

Citation
Robert Windecker, Stefan Franz, and Hans J. Tiziani, "Optical roughness measurements with fringe projection," Appl. Opt. 38, 2837-2842 (1999)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-38-13-2837


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References

  1. D. J. Whitehouse, “Review article: surface metrology,” Meas. Sci. Technol. 8, 955–972 (1997). [CrossRef]
  2. U. Breitmeier, “Lasermeßtechnik zur Oberflächen-Qualitätskontrolle,” Laser Optoelektron. 24(2), 48–53 (1992).
  3. R. G. Dorsch, G. Häusler, J. M. Herrmann, “Laser triangulation: fundamental uncertainty in distance measurement,” Appl. Opt. 33, 1306–1314 (1994). [CrossRef] [PubMed]
  4. T. Wilson, ed., Confocal Microscopy (Academic, London), Chaps. 1–3 (1990).
  5. R. Windecker, H. J. Tiziani, “Optical roughness measurements using extended white light interferometry” (Opt. Eng., to be published).
  6. K. Leonhardt, U. Droste, H. J. Tiziani, “Microshape and rough-surface analysis by fringe projection,” Appl. Opt. 33, 7477–7488 (1994). [CrossRef] [PubMed]
  7. G. Frankowski, “Optisches 3D-Meßsystem zur Mikroprofil-und Rauheitsmessung,” F&M, 106, 612–615 (1998).
  8. R. Windecker, M. Fleischer, H. J. Tiziani, “Three-dimensional topometry with stereo microscopes,” Opt. Eng. 36, 3372–3377 (1997). [CrossRef]
  9. M. Takeda, K. Mutoh, “Fourier-transform profilometry for the automatic measurement of 3-D object shape,” Appl. Opt. 34, 3977–3982 (1983). [CrossRef]
  10. R. Windecker, H. J. Tiziani, “Topometry of technical and biological objects by fringe projection,” Appl. Opt. 34, 3644–3650 (1995). [CrossRef] [PubMed]
  11. H. O. Saldner, J. M. Huntley, “Profilometry using temporal phase unwrapping and a spatial light modulator-based fringe projector,” Opt. Eng. 36, 610–615 (1997). [CrossRef]
  12. J. Gerber, P. Kühmstedt, R. Kowarschik, G. Notni, W. Schreiber, “Three-coordinate measuring system with structured light,” in Interferometry ’94: Photomechanics, R. J. Pryputniewicz, J. Stupnicki, eds., Proc. SPIE2342, 41–49 (1994).
  13. R. Windecker, H. J. Tiziani, “Semispatial, robust, and accurate phase evaluation algorithm,” Appl. Opt. 34, 7321–7326 (1995). [CrossRef] [PubMed]
  14. J. Schmit, K. Croath, “Window function influence on phase error in phase-shifting algorithms,” Appl. Opt. 35, 5642–5649 (1996). [CrossRef] [PubMed]
  15. K. J. Stout, P. J. Sullivan, W. P. Dong, E. Mainsah, N. Luo, T. Mathia, H. Zahouani, “The development of methods for the characterization of roughness in three dimensions,” (Commission of the European Communities, London, 1993).
  16. H. J. Jordan, M. Wegner, H. J. Tiziani, “Highly accurate non-contact characterization of engineering surfaces using confocal microscopy,” Meas. Sci. Technol. 9, 1142–1151 (1998). [CrossRef]

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