Mass-Transport Fabrication of Off-Axis and Prismatic Gallium Phosphide Optics
Applied Optics, Vol. 38, Issue 14, pp. 2979-2985 (1999)
http://dx.doi.org/10.1364/AO.38.002979
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Abstract
Refractive prismatic and off-axis micro-optical elements have been fabricated in gallium phosphide by mass-transport smoothing of multistep and binary preforms, respectively. A total optical efficiency of greater than 94% was measured for the prism, while diffraction-limited collimation and steering were demonstrated with the off-axis lens. A qualitative discussion of possible errors in binary preform etching and their effects on the surface figure is also included.
© 1999 Optical Society of America
[Optical Society of America ]
OCIS Codes
(160.6000) Materials : Semiconductor materials
(220.1250) Optical design and fabrication : Aspherics
(220.3630) Optical design and fabrication : Lenses
(230.5480) Optical devices : Prisms
Citation
Todd A. Ballen and James R. Leger, "Mass-Transport Fabrication of Off-Axis and Prismatic Gallium Phosphide Optics," Appl. Opt. 38, 2979-2985 (1999)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-38-14-2979
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