Refractive prismatic and off-axis micro-optical elements have been fabricated in gallium phosphide by mass-transport smoothing of multistep and binary preforms, respectively. A total optical efficiency of greater than 94% was measured for the prism, while diffraction-limited collimation and steering were demonstrated with the off-axis lens. A qualitative discussion of possible errors in binary preform etching and their effects on the surface figure is also included.
© 1999 Optical Society of America
Todd A. Ballen and James R. Leger, "Mass-Transport Fabrication of Off-Axis and Prismatic Gallium Phosphide Optics," Appl. Opt. 38, 2979-2985 (1999)