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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 38, Iss. 14 — May. 10, 1999
  • pp: 2986–2990

Fabrication of microprisms for planar optical interconnections by use of analog gray-scale lithography with high-energy-beam–sensitive glass

Christiane Gimkiewicz, Detlev Hagedorn, Jürgen Jahns, Ernst-Bernhard Kley, and Frank Thoma  »View Author Affiliations


Applied Optics, Vol. 38, Issue 14, pp. 2986-2990 (1999)
http://dx.doi.org/10.1364/AO.38.002986


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Abstract

For an integrated free-space optical interconnection system we suggest the use of microprisms to achieve large coupling angles at low loss. Prisms were fabricated in photoresist and quartz glass by analog lithography. High-energy-beam–sensitive glass was used as the gray-tone mask. Optical testing of the prisms shows acceptable surface quality and high efficiency (95%).

© 1999 Optical Society of America

OCIS Codes
(200.4650) Optics in computing : Optical interconnects
(350.3950) Other areas of optics : Micro-optics

History
Original Manuscript: August 5, 1998
Revised Manuscript: November 23, 1998
Published: May 10, 1999

Citation
Christiane Gimkiewicz, Detlev Hagedorn, Jürgen Jahns, Ernst-Bernhard Kley, and Frank Thoma, "Fabrication of microprisms for planar optical interconnections by use of analog gray-scale lithography with high-energy-beam–sensitive glass," Appl. Opt. 38, 2986-2990 (1999)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-38-14-2986

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