Utilization of second-, third-, and fourth-order diffraction is discussed for providing a single reflection grating lens that yields the same wave-front conversions for wavelengths of 420, 280, and 210 nm, which are used to sense NO<sub><i>x</i></sub> and SO<sub>2</sub> gas densities. A blazed grating lens was fabricated by a planar process and characterized by use of UV lamps. The same wave-front conversion was observed at the three UV wavelengths. Efficiencies were measured to be 80%, 70%, and 30% for second-, third-, and fourth-order diffractions, respectively, at wavelengths of 420, 280, and 210 nm, respectively.
© 1999 Optical Society of America
(050.1950) Diffraction and gratings : Diffraction gratings
(120.5700) Instrumentation, measurement, and metrology : Reflection
(220.3740) Optical design and fabrication : Lithography
(230.0230) Optical devices : Optical devices
Shogo Ura, Yoichi Honzawa, Toshiaki Suhara, and Hiroshi Nishihara, "Reflection-Type Multiorder Grating Lens for Three Ultraviolet Wavelengths," Appl. Opt. 38, 3008-3011 (1999)