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Applied Optics

Applied Optics


  • Vol. 38, Iss. 14 — May. 10, 1999
  • pp: 3008–3011

Reflection-type multiorder grating lens for three ultraviolet wavelengths

Shogo Ura, Yoichi Honzawa, Toshiaki Suhara, and Hiroshi Nishihara  »View Author Affiliations

Applied Optics, Vol. 38, Issue 14, pp. 3008-3011 (1999)

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Utilization of second-, third-, and fourth-order diffraction is discussed for providing a single reflection grating lens that yields the same wave-front conversions for wavelengths of 420, 280, and 210 nm, which are used to sense NO x and SO2 gas densities. A blazed grating lens was fabricated by a planar process and characterized by use of UV lamps. The same wave-front conversion was observed at the three UV wavelengths. Efficiencies were measured to be 80%, 70%, and 30% for second-, third-, and fourth-order diffractions, respectively, at wavelengths of 420, 280, and 210 nm, respectively.

© 1999 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(120.5700) Instrumentation, measurement, and metrology : Reflection
(220.3740) Optical design and fabrication : Lithography
(230.0230) Optical devices : Optical devices

Original Manuscript: August 3, 1998
Revised Manuscript: November 13, 1998
Published: May 10, 1999

Shogo Ura, Yoichi Honzawa, Toshiaki Suhara, and Hiroshi Nishihara, "Reflection-type multiorder grating lens for three ultraviolet wavelengths," Appl. Opt. 38, 3008-3011 (1999)

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