Micromirrors were fabricated in gallium phosphide by mass transport to provide spatial-mode control of vertical-cavity surface-emitting lasers (VCSEL’s). The concave mirrors were used in an external-cavity configuration to provide spatial filtering in the far field. Single-mode cw lasing was demonstrated in 15-μm-diameter VCSEL’s with currents as high as 6 times threshold. The fabrication process was extended to micromirrors in gallium arsenide by use of a replication and dry-etch transfer process.
© 1999 Optical Society of America
(160.6000) Materials : Semiconductor materials
(220.4000) Optical design and fabrication : Microstructure fabrication
(250.7260) Optoelectronics : Vertical cavity surface emitting lasers
(330.6110) Vision, color, and visual optics : Spatial filtering
(350.3950) Other areas of optics : Micro-optics
Fredrik Nikolajeff, Todd A. Ballen, James R. Leger, Anand Gopinath, Tzu-Chen Lee, and Robert C. Williams, "Spatial-Mode Control of Vertical-Cavity Lasers with Micromirrors Fabricated and Replicated in Semiconductor Materials," Appl. Opt. 38, 3030-3038 (1999)