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Applied Optics

Applied Optics


  • Vol. 38, Iss. 14 — May. 10, 1999
  • pp: 3068–3076

Stray-light effects of diffractive beam-shaping elements in optical microsystems

Markus Rossi and Thomas Hessler  »View Author Affiliations

Applied Optics, Vol. 38, Issue 14, pp. 3068-3076 (1999)

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The use of diffractive beam-shaping elements in hybrid or monolithic microsystems is investigated. Compact optical systems require diffractive structures with small grating periods for creating large deflection angles. Such elements are difficult to fabricate while a low stray-light level is maintained. In addition, because of the small geometrical dimensions and the short propagation lengths in an optomechanical microsystem, any stray light generated by the diffractive structure critically affects the overall optical performance. A model for the estimation of the interference effects between the designed and the unwanted diffraction orders is developed and applied to an example of a collimating diffractive optical element. On the basis of theoretical and experimental results, design rules for the application of diffractive beam-shaping elements in microsystems are derived.

© 1999 Optical Society of America

OCIS Codes
(050.1960) Diffraction and gratings : Diffraction theory
(050.1970) Diffraction and gratings : Diffractive optics
(110.4280) Imaging systems : Noise in imaging systems
(140.3300) Lasers and laser optics : Laser beam shaping
(220.0220) Optical design and fabrication : Optical design and fabrication
(350.3950) Other areas of optics : Micro-optics

Original Manuscript: September 25, 1998
Revised Manuscript: November 30, 1998
Published: May 10, 1999

Markus Rossi and Thomas Hessler, "Stray-light effects of diffractive beam-shaping elements in optical microsystems," Appl. Opt. 38, 3068-3076 (1999)

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