A method for high-resolution three-dimensional shape measurement for a shadow moiré system is proposed. To increase the resolving power of the method, the problem caused by the harmonics of the moiré profile needs to be solved. It is well known that moiré fringes in a shadow moiré system have a nonsinusoidal profile caused by harmonics. The influence of the harmonics in moiré profile on the measurement accuracy of the method is discussed. The method is improved to eliminate the error caused by the harmonics in the moiré profile. Both simulation and experimental results show that the improved method can effectively reduce the influence of harmonics.
© 1999 Optical Society of America
Original Manuscript: November 12, 1998
Revised Manuscript: February 11, 1999
Published: June 1, 1999
Yasuhiko Arai and Shunsuke Yokozeki, "Improvement of measurement accuracy in shadow moiré by considering the influence of harmonics in the moiré profile," Appl. Opt. 38, 3503-3507 (1999)