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Applied Optics

Applied Optics


  • Vol. 38, Iss. 16 — Jun. 1, 1999
  • pp: 3566–3571

Silicon planar-apertured probe array for high-density near-field optical storage

Myung Bok Lee, Motonobu Kourogi, Takashi Yatsui, Kazuo Tsutsui, Nobufumi Atoda, and Motoichi Ohtsu  »View Author Affiliations

Applied Optics, Vol. 38, Issue 16, pp. 3566-3571 (1999)

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We propose a novel, to our knowledge, silicon planar-apertured probe array as an optical head for high-density near-field optical storage. In comparison with a conventional fiber probe employed for near-field optical storage the apertured probe array has a higher readout data-transmission rate and better mechanical durability. A probe array with an aperture size of 100 nm was fabricated by use of photolithography and wet etching of a silicon wafer. Subwavelength-readout capability was demonstrated by use of one aperture of the probe array. Furthermore, we achieved a 16 times increase in the light-transmission efficiency of the probe array by installing glass-sphere microlenses on each aperture. The increase was confirmed by measurement of the near-field optical intensity.

© 1999 Optical Society of America

OCIS Codes
(040.1240) Detectors : Arrays
(110.1220) Imaging systems : Apertures
(180.5810) Microscopy : Scanning microscopy
(210.4680) Optical data storage : Optical memories
(220.4000) Optical design and fabrication : Microstructure fabrication

Original Manuscript: December 21, 1998
Revised Manuscript: March 4, 1999
Published: June 1, 1999

Myung Bok Lee, Motonobu Kourogi, Takashi Yatsui, Kazuo Tsutsui, Nobufumi Atoda, and Motoichi Ohtsu, "Silicon planar-apertured probe array for high-density near-field optical storage," Appl. Opt. 38, 3566-3571 (1999)

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